Performance of Cantilever Structure Inspired by Tree Patterns

2021 ◽  
pp. 47-59
Author(s):  
Yap Kian Lim ◽  
Mohammed Parvez Anwar ◽  
Jaganathan Jayaprakash ◽  
Wael Elleithy ◽  
Teck Leong Lau ◽  
...  
Keyword(s):  
Tree Patterns ◽  
Cantilever Structure

Fabrication of Monolithic Integrated Bimaterial Resonant Uncooled IR Sensor

2013 ◽  
Vol 543 ◽  
pp. 176-179 ◽  
Author(s):  
D.Q. Zhao ◽  
Xia Zhang ◽  
P. Liu ◽  
F. Yang ◽  
C. Lin ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Hole Mobility ◽  
Micro Electro Mechanical System ◽  
Cmos Process ◽  
Standard Cmos Process ◽  
Ir Sensor ◽  
Cantilever Structure ◽  
Cmos Mems ◽  
On Chip ◽  
Micro Cantilever

In this work we studied the fabrication of a monolithic bimaterial micro-cantilever resonant IR sensor with on-chip drive circuits. The effects of high temperature process and stress induced performance degradation were investigated. The post-CMOS MEMS (micro electro mechanical system) fabrication process of this IR sensor is the focus of this paper, starting from theoretical analysis and simulation, and then moving to experimental verification. The capacitive cantilever structure was fabricated by surface micromachining method, and drive circuits were prepared by standard CMOS process. While the stress introduced by MEMS films, such as the tensile silicon nitride which works as a contact etch stopper layer for MOSFETs and releasing stop layer for the MEMS structure, increases the electron mobility of NMOS, PMOS hole mobility decreases. Moreover, the NMOS threshold voltage (Vth) shifts, and transconductance (Gm) degrades. An additional step of selective removing silicon nitride capping layer and polysilicon layer upon IC area were inserted into the standard CMOS process to lower the stress in MOSFET channel regions. Selective removing silicon nitride and polysilicon before annealing can void 77% Vth shift and 86% Gm loss.

Evaluating reliability of tree-patterns in extreme-K categorical samples problems

2021 ◽  
pp. 1-22
Author(s):  
Elizabeth Chou ◽  
Yin-Chen Hsieh ◽  
Sabrina Enriquez ◽  
Fushing Hsieh
Keyword(s):  
Tree Patterns

Mechanical Analysis of Enclosure Pile under Different Constraints

2011 ◽  
Vol 90-93 ◽  
pp. 485-489
Author(s):  
Li Guo ◽  
Peng Li He ◽  
Guang Jun Zhang
Keyword(s):  
Mechanical Analysis ◽  
Subway Station ◽  
Deep Foundation ◽  
Foundation Pit ◽  
Deep Foundation Pit ◽  
Retaining Structure ◽  
Cantilever Structure ◽  
Reinforcement Measures

The enclosure pile is extensively used as retaining structure in the foundation pit excavation. And it is always combined with other reinforcement measures. So it is unreasonable to a certain degree that the enclosure pile is analyzed as cantilever structure. Taken the deep foundation pit of a subway station in Hefei for instance, the effect of other reinforcement measures on restrained conditions of enclosure piles in the paper was taken into account. And the behavior of enclosure pile under various restrained conditions was analyzed. Based on that, some helpful suggestions for practical retaining structure of foundation pit were put forward.

Zero-nonzero tree patterns that allow

2021 ◽  
pp. 1-23
Author(s):  
Luyining Gan ◽  
Wei Gao ◽  
Jie Han
Keyword(s):  
Tree Patterns

Discovery of Maximally Frequent Tag Tree Patterns with Contractible Variables from Semistructured Documents

2004 ◽  
pp. 133-144 ◽  
Author(s):  
Tetsuhiro Miyahara ◽  
Yusuke Suzuki ◽  
Takayoshi Shoudai ◽  
Tomoyuki Uchida ◽  
Kenichi Takahashi ◽  
...  
Keyword(s):  
Tree Patterns ◽  
Semistructured Documents

Mining Maximal Embedded Unordered Tree Patterns

2007 ◽  
Author(s):  
Mostafa Haghir Chehreghani ◽  
Masoud Rahgozar ◽  
Caro Lucas ◽  
Morteza Haghir Chehreghani
Keyword(s):  
Tree Patterns ◽  
Unordered Tree
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