Non-destructive depth profile reconstruction of bio-engineered surfaces by parallel-angle-resolved X-ray photoelectron spectroscopy

Abstract Non-destructive depth profile evaluation of multi-layer thin film stacks using simultaneous analysis of angle-resolved x-ray photoelectron spectroscopy data from multiple instruments is demonstrated. The data analysis algorithm, called the maximum smoothness method, was originally designed to handle data from a single XPS instrument with a single x-ray energy; in this work, the algorithm is extended to provide a simultaneous analysis tool which can handle data from multiple instruments with multiple x-ray energies. The analysis provides depth profiles for multilayer stacks that cannot be obtained by conventional data analysis methods. In this paper, metal multi-layer stack samples with total thickness greater than 10 nm are analyzed with the maximum smoothness method to nondestructively obtain depth profiles, with precise information on the chemical states of atoms in the surface layer (< 2 nm) and the overall layer stack structure, which can only be obtained by analyzing the data from multiple instruments.

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Non-destructive compositional depth profile analysis by hard x-ray photoelectron spectroscopy

Journal of Physics Conference Series ◽

10.1088/1742-6596/100/1/012042 ◽

2008 ◽

Vol 100 (1) ◽

pp. 012042 ◽

Cited By ~ 7

Author(s):

J Rubio-Zuazo ◽

G R Castro

Keyword(s):

Depth Profile ◽

Photoelectron Spectroscopy ◽

Profile Analysis ◽

Depth Profile Analysis ◽

X Ray ◽

Compositional Depth Profile ◽

Non Destructive

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An X-ray photoelectron spectroscopy depth profile study on the InGeNi/(110) cleaved GaAs structure

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2018.02.022 ◽

2018 ◽

Vol 82 ◽

pp. 62-66 ◽

Cited By ~ 1

Author(s):

Constantin Catalin Negrila ◽

Mihail Florin Lazarescu ◽

Constantin Logofatu ◽

Rodica V. Ghita ◽

Costel Cotirlan

Keyword(s):

Depth Profile ◽

Photoelectron Spectroscopy ◽

X Ray ◽

Gaas Structure ◽

Profile Study

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Montecarlo Simulation and HAXPES Analysis of Organosilane Segregation in Titania Xerogel Films; Towards a Generic Surface Chemofunctionalization Process

Surfaces ◽

10.3390/surfaces3030026 ◽

2020 ◽

Vol 3 (3) ◽

pp. 352-365

Author(s):

Javier Mateo Moreno ◽

Rodrigo Calvo Membibre ◽

Sergio Pinilla Yanguas ◽

Juan Rubio Zuazo ◽

Miguel Manso Siván

Keyword(s):

Photoelectron Spectroscopy ◽

Surface Segregation ◽

Titanium Isopropoxide ◽

Condensation Process ◽

X Ray ◽

Depth Profiles ◽

Partial Charges ◽

Xerogel Films ◽

Non Destructive

The formation of xerogels implies a sequence of hydrolysis and condensation reactions, which are intricate to analyze in heteromolecular sols. We analyze by probabilistic Montecarlo methods the development of hybrid organosilane–titania xerogels and illustrate how partial charges of the reacting molecules can help estimating relative probabilities for the condensation of the molecules. Since the condensation rate of Ti alkoxides is much higher than the corresponding rate of Si alkoxides (especially if bearing a non-hydrolizable group), by imposing a fast condensation process in agreement with low pH kinetics, the process leads to a surface segregation of the organosilane. The simulation results are compared with results of characterization of thin condensates of two different organosilanes within a titanium–isopropoxide matrix. Non-destructive in-depth profiles were obtained by hard x-ray photoelectron spectroscopy, which can resolve through estimation of Si and specific moieties of the organosilane molecules the progress of the condensation. These results are relevant for the generalization of chemo-functionalization processes by kinetic demixing of organosilanes, which have myriad applications in biomedicine and biotechnology.

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