Piezoelectric response of a PZT thin film to magnetic fields from permanent magnet and coil combination

2014 ◽  
Vol 118 (1) ◽  
pp. 225-230 ◽  
Author(s):  
B. Guiffard ◽  
R. Seveno
Keyword(s):  
Thin Film ◽  
Magnetic Fields ◽  
Permanent Magnet ◽  
Piezoelectric Response ◽  
Pzt Thin Film

Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

2009 ◽  
Vol 421-422 ◽  
pp. 95-98
Author(s):  
Tsuyoshi Aoki ◽  
Shigeyoshi Umemiya ◽  
Masaharu Hida ◽  
Kazuaki Kurihara
Keyword(s):  
Thin Film ◽  
Fem Analysis ◽  
Active Part ◽  
Piezoelectric Response ◽  
Small Displacement ◽  
Shear Mode ◽  
Mems Devices ◽  
Pzt Film ◽  
Pzt Thin Film ◽  
Piezoelectric Constants

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

scholarly journals A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 710
Author(s):  
Po-Chen Yeh ◽  
Hao Duan ◽  
Tien-Kan Chung
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Magnetic Fields ◽  
Thick Film ◽  
Microelectromechanical Systems ◽  
Magnetic Field Sensor ◽  
Sensing Element ◽  
Ac Magnetic Field ◽  
Pzt Thin Film ◽  
Field Sensor

We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO2 insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mVrms/Oe, 0.156 mVrms/Oe, and 0.035 mVrms/Oe, respectively, for sensing element A and 0.033 mVrms/Oe, 0.044 mVrms/Oe, and 0.130 mVrms/Oe, respectively, for sensing element B.

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Piezoelectric PZT thin-film transformers with a ring–dot structure

2020 ◽  
Vol 59 (SP) ◽  
pp. SPPD09
Author(s):  
Sang-Hyo Kweon ◽  
Kazuki Tani ◽  
Kensuke Kanda ◽  
Sahn Nahm ◽  
Isaku Kanno
Keyword(s):  
Thin Film ◽  
Pzt Thin Film

scholarly journals Magnetic textures in a hexaferrite thin film and their response to magnetic fields revealed by phase microscopy

2019 ◽  
Vol 58 (6) ◽  
pp. 065004 ◽  
Author(s):  
Atsuhiro Kotani ◽  
Ken Harada ◽  
Marek Malac ◽  
Hiroshi Nakajima ◽  
Kosuke Kurushima ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetic Fields ◽  
Phase Microscopy

Magnetophoresis Effects on the Flow Characteristics of Oil-Based Ferrofluids in Rectangular Enclosures

2015 ◽  
Vol 15 (10) ◽  
pp. 7451-7456
Author(s):  
Hyeon-Seok Seo ◽  
Jin-Hyo Boo ◽  
Youn-Jea Kim
Keyword(s):  
Magnetic Fields ◽  
Permanent Magnet ◽  
Flow Characteristics ◽  
Flow Fields ◽  
Working Fluid ◽  
Magnetic Flux Density ◽  
Magnetic Field Direction ◽  
Analysis Model ◽  
Rectangular Enclosure ◽  
Flow Phenomena

This study numerically investigated the flow characteristics in a rectangular enclosure filled with oil-based ferrofluid (EFH-1, Ferrotec.) under the influence of external magnetic fields. The rectangular enclosure contained obstacles with different shapes, such as a rectangle and a triangle mounted on the top and bottom wall surfaces. In order to generate external magnetic fields, a permanent magnet was located in the lower part of the rectangular enclosure, and its direction was selected to be either horizontal or vertical. Our results showed that the ferrofluid flow fields were affected by the applied external magnetic field direction and eddy flow phenomena in the working fluid were generated in the vicinity of high magnetic flux density distributions, such as at the edge of the permanent magnet. It was also confirmed that the magnetophoretic force distributions in the analysis model played a significant role in the development of the ferrofluid flow fields.

Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors

2001 ◽  
Vol 92 (1-3) ◽  
pp. 156-160 ◽  
Author(s):  
Korbinian Kunz ◽  
Peter Enoksson ◽  
Göran Stemme
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Highly Sensitive

Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors

1993 ◽  
Vol 310 ◽  
Author(s):  
In K. Yoo ◽  
Seshu B. Desu ◽  
Jimmy Xing
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Lead Zirconate Titanate ◽  
Oxygen Vacancies ◽  
Lead Zirconate ◽  
Electrical Degradation ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Pzt Thin Film ◽  
Degradation Properties

AbstractMany attempts have been made to reduce degradation properties of Lead Zirconate Titanate (PZT) thin film capacitors. Although each degradation property has been studied extensively for the sake of material improvement, it is desired that they be understood in a unified manner in order to reduce degradation properties simultaneously. This can be achieved if a common source(s) of degradations is identified and controlled. In the past it was noticed that oxygen vacancies play a key role in fatigue, leakage current, and electrical degradation/breakdown of PZT films. It is now known that space charges (oxygen vacancies, mainly) affect ageing, too. Therefore, a quantitative ageing mechanism is proposed based on oxygen vacancy migration under internal field generated by either remanent polarization or spontaneous polarization. Fatigue, leakage current, electrical degradation, and polarization reversal mechanisms are correlated with the ageing mechanism in order to establish guidelines for simultaneous degradation control of PZT thin film capacitors. In addition, the current pitfalls in the ferroelectric test circuit is discussed, which may cause false retention, imprint, and ageing.

Sign in / Sign up

Export Citation Format

Share Document