Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures

2011 ◽  
Vol 18 (1) ◽  
pp. 9-23 ◽  
Author(s):  
A. Ravi Sankar ◽  
J. Grace Jency ◽  
S. Das
Keyword(s):  
High Performance ◽  
Proof Mass

Design of a Hybrid Acoustic Device Based on Proof-Mass Actuators

2012 ◽  
Author(s):  
Francesco Braghin ◽  
Francesco Castelli-Dezza ◽  
Simone Cinquemani ◽  
Ferruccio Resta
Keyword(s):  
High Performance ◽  
Proof Mass ◽  
Supporting Surface ◽  
Low Frequencies ◽  
High Frequencies ◽  
Sound Reproduction ◽  
Different Types ◽  
Magnetostrictive Actuator ◽  
Acoustic Device

The paper deals with the design of a device for sound reproduction to be fixed to a supporting surface. The device is made up of two different types of acoustic actuators based on different technologies that allow good sound reproduction in the range of frequencies from 20Hz to 20kHz. The generation of sound at high frequencies is demanded to a magnetostrictive actuator, while a more traditional magnetodynamics actuator is used to generate sound at low frequencies. The coupling between these two actuators leads to a device having small overall dimensions and high performance.

A Monolithic Three-Axis Accelerometer with Low Cross-Axis Sensitivity

2011 ◽  
Vol 403-408 ◽  
pp. 691-696
Author(s):  
Chang De He ◽  
Wen Dong Zhang ◽  
Ji Jun Xiong ◽  
Chen Yang Xue ◽  
Gui Xiong Shi
Keyword(s):  
High Performance ◽  
Proof Mass ◽  
Cantilever Beams ◽  
3 Dimensional ◽  
Simulation Results ◽  
The Cross ◽  
Sensitive Structure ◽  
Cross Axis

A 50,000g three-axis accelerometer using a single proof mass is presented. The sensitive structure is made of a single proof mass and eight cantilever beams. Twelve piezoresistors are placed on the cantilevers symmetrically, which can be used to detect 3-dimensional acceleration. The symmetric placement of the piezoresistors brings the reasonable sensitivity and simultaneously decreases the cross-axis sensitivity significantly. Simulation results show that the sensitivity in X-, Y- and Z-axis are 0.806uV/g, 0.806uV/g and 3.71uV/g respectively with 5V supply and the cross-axis sensitivities are all less than 2.4%, which ensures the high performance of the three-axis accelerometer.

Optical Cavity Interrogation for MEMS Accelerometers

2015 ◽  
Vol 2015 (DPC) ◽  
pp. 001649-001670
Author(s):  
Michael Kranz ◽  
Tracy Hudson ◽  
Brian Grantham ◽  
Michael Whitley
Keyword(s):  
High Performance ◽  
Proof Mass ◽  
Inertial Sensors ◽  
Optical Cavity ◽  
Tunable Laser ◽  
Cavity Resonance ◽  
Optical Readout ◽  
Macro Scale ◽  
Mems Accelerometers ◽  
Mass Displacement

MEMS accelerometers utilizing electrostatic, piezoelectric, and magnetic proof mass displacement readout approaches have achieved success in both commercial- and defense-related applications. However, there is a desire for improved acceleration resolution suitable for navigation-grade applications. Optical readout of mechanical displacements has demonstrated high levels of resolution in macro-scale applications including precision movement and placement systems. In addition, optical techniques are common in high performance inertial sensors such as fiber optic gyros and ring laser gyros. Incorporating optical readout approaches into MEMS acceleration devices may yield sufficient resolution to achieve navigation-grade performance. Therefore, the U.S. Army AMRDEC is developing MEMS accelerometers based on optical cavity resonance readout. In the device, an optical cavity is formed between a MEMS proof mass and a reference reflector. A tunable laser excites the cavity on the edge of its resonance peak. Small displacements of the cavity from its rest position are detected by frequency shifts of the resonance, leading to high-resolution proof mass displacement detection and therefore high acceleration resolutions. This paper will present modeling associated with the design concept, as well predictions of device geometries and performance with the goal of achieving less than 1 micro-g bias instability and a velocity random walk of better than 0.2 micro-g/rt.Hz.

High performance PZT thick films based on bonding technique for d31 mode harvester with integrated proof mass

2014 ◽  
Vol 214 ◽  
pp. 88-94 ◽  
Author(s):  
Bin Yang ◽  
Yanbo Zhu ◽  
Xingzhao Wang ◽  
Jing-quan Liu ◽  
Xiang Chen ◽  
...  
Keyword(s):  
High Performance ◽  
Proof Mass ◽  
Thick Films ◽  
Bonding Technique

ONERA accelerometers for future gravity mission

2020 ◽  
Author(s):  
Marine Dalin ◽  
Vincent Lebat ◽  
Damien Boulanger ◽  
Francoise Liorzou ◽  
Bruno Christophe ◽  
...  
Keyword(s):  
Attitude Control ◽  
High Performance ◽  
Small Volume ◽  
Proof Mass ◽  
Angular Acceleration ◽  
Linear Acceleration ◽  
Dynamic Analyses ◽  
Electrostatic Accelerometer ◽  
Scientific Return ◽  
Gravity Mission

<p>ONERA (the French Aerospace Lab) is developing, manufacturing and testing ultra-sensitive electrostatic accelerometer for space application. ONERA has procured the accelerometer for all the previous gravity missions (GRACE, GOCE, GRACE-FO) and works to improve the scientific return of the instruments.</p><p>One way is to propose an accelerometer with 3 sensitive linear acceleration measurements as well as 3 angular acceleration measurements for the attitude control or reconstruction. Two different configurations are proposed: CubSTAR, a miniaturized version with low accuracy but adapted for constellation or nanosat; and MicroSTAR, a high accuracy accelerometer.</p><p>CubSTAR accelerometer is a small volume instrument with the same performance on the 3 axes, the baseline being 20x20x20mm proof-mass in a 15x15x20cm volume envelope. A prototype was manufactured and tested during a drop-tower test. Moreover this prototype will be tested in vibration environment to check its good mechanical behavior.</p><p>MicroSTAR accelerometer is designed with a disruptive mechanical concept allowing using a 30x30x30mm proof-mass, with the same high-performance on the 3 axes. Modal and dynamic analyses have been performed and a prototype is under manufacturing.  </p>

A High Performance Energy Analyzer for Use in Electron Scanning Microscopy

1969 ◽  
Vol 27 ◽  
pp. 14-15
Author(s):  
A. V. Crewe ◽  
M. Isaacson ◽  
D. Johnson
Keyword(s):  
High Performance ◽  
Vertical Plane ◽  
Median Plane ◽  
Electron Gun ◽  
Uniform Field ◽  
Loss Mechanism ◽  
Electron Scanning Microscopy ◽  
Sector Type ◽  
Double Focusing ◽  
Electron Energy Loss

A double focusing magnetic spectrometer has been constructed for use with a field emission electron gun scanning microscope in order to study the electron energy loss mechanism in thin specimens. It is of the uniform field sector type with curved pole pieces. The shape of the pole pieces is determined by requiring that all particles be focused to a point at the image slit (point 1). The resultant shape gives perfect focusing in the median plane (Fig. 1) and first order focusing in the vertical plane (Fig. 2).

Vacuum System to Minimize the Specimen Contamination of High-Performance EM

1977 ◽  
Vol 35 ◽  
pp. 68-69
Author(s):  
N. Yoshimura ◽  
K. Shirota ◽  
T. Etoh
Keyword(s):  
Electron Microscope ◽  
High Speed ◽  
High Performance ◽  
High Vacuum ◽  
Vacuum System ◽  
Pump System ◽  
Pumping System ◽  
Diffusion Pump ◽  
Almost All ◽  
Cascade Type

One of the most important requirements for a high-performance EM, especially an analytical EM using a fine beam probe, is to prevent specimen contamination by providing a clean high vacuum in the vicinity of the specimen. However, in almost all commercial EMs, the pressure in the vicinity of the specimen under observation is usually more than ten times higher than the pressure measured at the punping line. The EM column inevitably requires the use of greased Viton O-rings for fine movement, and specimens and films need to be exchanged frequently and several attachments may also be exchanged. For these reasons, a high speed pumping system, as well as a clean vacuum system, is now required. A newly developed electron microscope, the JEM-100CX features clean high vacuum in the vicinity of the specimen, realized by the use of a CASCADE type diffusion pump system which has been essentially improved over its predeces- sorD employed on the JEM-100C.

Use of the Magnetostatic Analogue In Electromagnetic Lens Engineering

1970 ◽  
Vol 28 ◽  
pp. 360-361
Author(s):  
John W. Coleman
Keyword(s):  
Boundary Conditions ◽  
High Performance ◽  
Force Fields ◽  
Optical Design ◽  
Direct Conversion ◽  
Design Engineering ◽  
Design Data ◽  
Scalar Potentials ◽  
Geometric Elements ◽  
At Will

In the design engineering of high performance electromagnetic lenses, the direct conversion of electron optical design data into drawings for reliable hardware is oftentimes difficult, especially in terms of how to mount parts to each other, how to tolerance dimensions, and how to specify finishes. An answer to this is in the use of magnetostatic analytics, corresponding to boundary conditions for the optical design. With such models, the magnetostatic force on a test pole along the axis may be examined, and in this way one may obtain priority listings for holding dimensions, relieving stresses, etc..The development of magnetostatic models most easily proceeds from the derivation of scalar potentials of separate geometric elements. These potentials can then be conbined at will because of the superposition characteristic of conservative force fields.

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