Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

2012 ◽  
Vol 18 (7-8) ◽  
pp. 945-953 ◽  
Author(s):  
Oliver Pabst ◽  
Michael Schiffer ◽  
Ernst Obermeier ◽  
Tolga Tekin ◽  
Klaus Dieter Lang ◽  
...  
Keyword(s):  
Residual Stress ◽  
High Temperature ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Temperature Applications

Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high temperature applications

2011 ◽  
Author(s):  
Oliver Pabst ◽  
Michael Schiffer ◽  
Ernst Obermeier ◽  
Tolga Tekin ◽  
Klaus Dieter Lang ◽  
...  
Keyword(s):  
Residual Stress ◽  
High Temperature ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Temperature Applications

scholarly journals Young’s modulus of iron and nickel in steels and alloys

2021 ◽  
Vol 2 (396) ◽  
pp. 67-72
Author(s):  
A. Bagerman ◽  
◽  
A. Troitsky ◽  
I. Leonova ◽  
◽  
...  
Keyword(s):  
High Temperature ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Temperature Range ◽  
Young’S Moduli ◽  
Predictive Assessment ◽  
Pure Metals ◽  
Materials Used ◽  
Full Scale Tests ◽  
Temperature Applications

Object and purpose of research. The object is steels and alloys for high-temperature applications. The purpose of the study is to obtain the necessary data for predicting the Young’s modulus of steels and alloys before their full-scale tests. Materials and methods. The data on the Young’s modulus of pure metals and reference data on the Young’s modulus of steels and alloys for high-temperature applications are the materials used in this study. The study uses the concept of "constraint" parameter to rank steels and alloys. Main results. The Young’s moduli of iron and nickel were determined during their operation as a part of steels and alloys, an algorithm for the predictive assessment of the Young’s modulus of steels and alloys was compiled in the temperature range 20–800 °С. Conclusion. It is shown that in the absence of experimental data, the Young’s modulus of steels and alloys can be estimated by the value of the "available" Young’s modulus, determined by the value of the Young’s modulus of pure metals. The results of the study showed the possibility of changing the Young’s modulus of pure metals during their operation as a part of steels and alloys, the characteristics of the Young’s modulus of iron and nickel during their operation as a part of steels and alloys and the algorithm for predicting the Young’s modulus of steels and alloys based on these metals in the temperature range of 20–800 °C were obtained.

scholarly journals High-Temperature Elastic Properties of Yttrium-Doped Barium Zirconate

Metals ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 968
Author(s):  
Fumitada Iguchi ◽  
Keisuke Hinata
Keyword(s):  
High Temperature ◽  
Young’S Modulus ◽  
Elastic Properties ◽  
Measurement Method ◽  
Young's Modulus ◽  
Barium Zirconate ◽  
Shear Moduli ◽  
Ceramic Fuel ◽  
Yttrium Concentration ◽  
Ceramic Fuel Cells

The elastic properties of 0, 10, 15, and 20 mol% yttrium-doped barium zirconate (BZY0, BZY10, BZY15, and BZY20) at the operating temperatures of protonic ceramic fuel cells were evaluated. The proposed measurement method for low sinterability materials could accurately determine the sonic velocities of small-pellet-type samples, and the elastic properties were determined based on these velocities. The Young’s modulus of BZY10, BZY15, and BZY20 was 224, 218, and 209 GPa at 20 °C, respectively, and the values decreased as the yttrium concentration increased. At high temperatures (>20 °C), as the temperature increased, the Young’s and shear moduli decreased, whereas the bulk modulus and Poisson’s ratio increased. The Young’s and shear moduli varied nonlinearly with the temperature: The values decreased rapidly from 100 to 300 °C and gradually at temperatures beyond 400 °C. The Young’s modulus of BZY10, BZY15, and BZY20 was 137, 159, and 122 GPa at 500 °C, respectively, 30–40% smaller than the values at 20 °C. The influence of the temperature was larger than that of the change in the yttrium concentration.

The evaluation of Young's modulus and residual stress of nickel films by microbridge testings

2004 ◽  
Vol 15 (12) ◽  
pp. 2389-2394 ◽  
Author(s):  
Z M Zhou ◽  
Y Zhou ◽  
C S Yang ◽  
J A Chen ◽  
G F Ding ◽  
...  
Keyword(s):  
Residual Stress ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Nickel Films

Microbridge Testing of Thin Films Under Small Deformation

1999 ◽  
Vol 594 ◽  
Author(s):  
T. Y. Zhang ◽  
Y. J. Su ◽  
C. F. Qian ◽  
M. H. Zhao ◽  
L. Q. Chen
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Silicon Nitride ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Chemical Vapor ◽  
Small Deformation ◽  
Nitride Film ◽  
Silicon Nitride Film ◽  
Pressure Chemical

AbstractThe present work proposes a novel microbridge testing method to simultaneously evaluate the Young's modulus, residual stress of thin films under small deformation. Theoretic analysis and finite element calculation are conducted on microbridge deformation to provide a closed formula of deflection versus load, considering both substrate deformation and residual stress in the film. Silicon nitride films fabricated by low pressure chemical vapor deposition on silicon substrates are tested to demonstrate the proposed method. The results show that the Young's modulus and residual stress for the annealed silicon nitride film are respectively 202 GPa and 334.9 MPa.

Young’s modulus of zirconia at high temperature

2006 ◽  
Vol 41 (22) ◽  
pp. 7663-7666 ◽  
Author(s):  
E. Yeugo Fogaing ◽  
Y. Lorgouilloux ◽  
M. Huger ◽  
C. P. Gault
Keyword(s):  
High Temperature ◽  
Young’S Modulus ◽  
Young's Modulus

Young's modulus of RF-sputtered amorphous thin films in the SiO2-Y2O3 system at high temperature

1997 ◽  
Vol 293 (1-2) ◽  
pp. 144-148 ◽  
Author(s):  
T. Shinoda ◽  
N. Soga ◽  
T. Hanada ◽  
S. Tanabe
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Amorphous Thin Films
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