Mode localization analysis and characterization in a 5-beam array of coupled nearly identical micromechanical resonators for ultra-sensitive mass detection and analyte identification

2012 ◽  
Vol 18 (11) ◽  
pp. 1923-1929 ◽  
Author(s):  
Dong F. Wang ◽  
Keisuke Chatani ◽  
Tsuyoshi Ikehara ◽  
Ryutaro Maeda
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  

Abstract This paper investigates the mass sensing in a mode-localized sensor composed of two weakly coupled MEMS cantilevers with lengths 98μm and 100μm. The two resonators are connected by a coupling beam near the fixed end, and the shortest cantilever is electrostatically actuated with a combined AC-DC voltage. The DC actuation voltage is tuned to compensate the length difference and geometrical imperfections in order to dynamically equilibrate the system. An analytical model of the device using the Euler Bernoulli beam theory is presented and the required DC voltage to reach the balanced state is used. A mass perturbation is then added on the long cantilever and the eigenstate shifts and amplitude ratios in each mode are calculated for different couplings. Results show that the amplitude ratio of the second mode is the best output metric for the mass detection. For the validation of the model, an experimental investigation is carried out by using devices fabricated with the Multi-User MEMS Processes. Three different couplings are considered and the long cantilever is designed with a mass attached at its end. Instead of adding a mass on the device, we remove this part with a probe to introduce the perturbation. When the mass is removed, the experimental frequency responses of the device show localized vibrations, which are in good agreement with the theoretical results.


2021 ◽  
Author(s):  
Jiahao Song ◽  
Ming Lyu ◽  
Najib Kacem ◽  
Jian Zhao ◽  
Pengbo Liu ◽  
...  

Abstract Mode-localization sensor with amplitude ratio as output metric has shown excellent potential in the field of micro-mass detection. In this paper, an asymmetric mode -localized mass sensor with a pair of electrostatically coupled resonators of different thickness is proposed. Partially distributed electrodes are introduced to ensure the asymmetric mode coupling of second and third order modes while actuating the thinner resonator by the distributed electrode. The analytical dynamic model is established by Euler–Bernoulli theory and solved by harmonic balance method (HBM) combined with asymptotic numerical method (ANM). Detailed investigations on the linear and nonlinear behavior, critical amplitude as well as the sensitivity of the sensor are performed. The sensitivity of the proposed sensor can be enhanced by about 20 times compared to first order mode-localized mass sensors. Furthermore, by exploiting the nonlinearities while driving the device beyond the critical amplitude for the in-phase mode, the sensor performs a great improvement in sensitivity up to 1.78 times. Besides, the influence of the decrease of coupling voltage is studied, which gives a good reference to avoid mode aliasing.


Author(s):  
Hongyun Sun ◽  
Huiqun Yuan

This paper deals with the coupling vibration characteristic of the disk-blade-shaft integration rotor. First, a reduced-order model (ROM) based on an improved hybrid interface component mode synthesis method (IHISCMSM) is carried out, which takes the prestress effect into account. The frequency of the disk-blade-shaft integration rotor at different rotating speeds are calculated and the influence of selecting different mode truncation numbers is investigated. In order to quantitatively evaluate the coupling degree of blade and disk, the coupling factor is defined from the perspective of strain energy, and the influence of prestress on system’s dynamic is discussed. Then, an experimental modal analysis is performed on blades to identify the mistuning parameters, and the mode localization of the disk-blade-shaft integration rotor is analyzed with and without blade mistuning. The results indicate that there are several types of coupling modes among blade, disk and shaft of the integration rotor. After considering the prestress, the frequency increases, and the axial coupling vibration degree and radial coupling vibration degree of the integration rotor change. The mode localization of mistuned rotor is more likely to occur in the modes dominated by mistuning stage blades. There also exists a subtle mode localization phenomenon for tuned integration rotor.


2014 ◽  
Vol 14 (3) ◽  
pp. 160-163 ◽  
Author(s):  
Roman Romashko ◽  
Timofey Efimov ◽  
Yuri Kulchin

Abstract Mass of macroscopic object is easily measured by a suitable balance. However, this approach becomes inapplicable if mass of microscopic object is to be determined. Alternative approach for mass measurement is based on using the micromechanical resonator as an inertial balance where oscillation frequency is shifted by small quantities of adsorbed mass. In this work we present experimental results of applying an adaptive interferometry technique based on dynamic hologram recorded in photorefractive CdTe crystal for measuring picogram mass adsorbed on micromechanical resonators with dimensions 215×40×15 μm3. It is also shown that the resonance micro-weighing system based on adaptive interferometer has potential for reducing the threshold of mass detection down to 10-17 g in the case of using a resonator with sub-micron dimensions


Author(s):  
Matthew Spletzer ◽  
Arvind Raman ◽  
Ron Reifenberger ◽  
Alexander Q. Wu ◽  
Xianfan Xu

Microcantilever based biochemical sensors rely on accurately detecting the selective binding of small amounts of the target analyte to a functionalized microcantilever. Commonly, the added mass of the bound analyte is detected by measuring accompanying shift in cantilever resonant frequency. In this paper we explore the possibility of using Anderson or mode localization in coupled oscillator arrays as a potentially more sensitive method for detecting the added mass. According to this method, the eigenvectors of an array of coupled, nominally identical cantilevers are expected to be extremely sensitive to small disorder such as that introduced by the added mass of the target biochemical analyte. A simple lumped parameter model of the cantilever array is used to establish theoretical feasibility of the method. The effects on the eigenvector sensitivity of initial statistical variability introduced due to inherent manufacturing tolerances are investigated. Experimental results are presented for a two cantilever array laser fabricated out of gold foil, and the results compared to theoretical expectations. Both the theoretical and experimental results indicate that added mass induced shifts in eigenvectors of such arrays can be orders of magnitude more sensitive than the resonance frequency shifts.


2010 ◽  
Vol 24 (1) ◽  
pp. 25-32 ◽  
Author(s):  
Peter Walla ◽  
Maria Richter ◽  
Stella Färber ◽  
Ulrich Leodolter ◽  
Herbert Bauer

Two experiments investigate effects related to food intake in humans. In Experiment 1, we measured startle response modulation while study participants ate ice cream, yoghurt, and chocolate. Statistical analysis revealed that ice cream intake resulted in the most robust startle inhibition compared to no food. Contrasting females and males, we found significant differences related to the conditions yoghurt and chocolate. In females, chocolate elicited the lowest response amplitude followed by yoghurt and ice cream. In males, chocolate produced the highest startle response amplitude even higher than eating nothing, whereas ice cream produced the lowest. Assuming that high response amplitudes reflect aversive motivation while low response amplitudes reflect appetitive motivational states, it is interpreted that eating ice cream is associated with the most appetitive state given the alternatives of chocolate and yoghurt across gender. However, in females alone eating chocolate, and in males alone eating ice cream, led to the most appetitive state. Experiment 2 was conducted to describe food intake-related brain activity by means of source localization analysis applied to electroencephalography data (EEG). Ice cream, yoghurt, a soft drink, and water were compared. Brain activity in rostral portions of the superior frontal gyrus was found in all conditions. No localization differences between conditions occurred. While EEG was found to be insensitive, startle response modulation seems to be a reliable method to objectively quantify motivational states related to the intake of different foods.


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