Plasma Enhanced Chemical Vapor Deposition of Poly(Cyclohexyl Methacrylate) as a Sacrificial Thin Film
2019 ◽
Vol 40
(1)
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pp. 357-369
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Keyword(s):
1989 ◽
Vol 47
◽
pp. 608-609
2010 ◽
Vol 157
(12)
◽
pp. H1110
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Keyword(s):
2017 ◽
Vol 31
(16-19)
◽
pp. 1744101
◽
2013 ◽
Vol 52
(3R)
◽
pp. 035501
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Keyword(s):