Robust Mechanical Properties of Electrically Insulative Alumina Films by Supersonic Aerosol Deposition

2015 ◽  
Vol 24 (6) ◽  
pp. 1046-1051 ◽  
Author(s):  
Jong-Gun Lee ◽  
You-Hong Cha ◽  
Do-Yeon Kim ◽  
Jong-Hyuk Lee ◽  
Tae-Kyu Lee ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Aerosol Deposition ◽  
Alumina Films

Mechanical properties of barrier-type anodic alumina films using nanoindentation

2003 ◽  
Vol 173 (2-3) ◽  
pp. 293-298 ◽  
Author(s):  
G. Alcalá ◽  
S. Mato ◽  
P. Skeldon ◽  
G.E. Thompson ◽  
A.B. Mann ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Anodic Alumina ◽  
Alumina Films ◽  
Barrier Type

scholarly journals Effects of mechanical properties of polymer on ceramic-polymer composite thick films fabricated by aerosol deposition

2012 ◽  
Vol 7 (1) ◽  
pp. 261 ◽  
Author(s):  
Oh-Yun Kwon ◽  
Hyun-Jun Na ◽  
Hyung-Jun Kim ◽  
Dong-Won Lee ◽  
Song-Min Nam
Keyword(s):  
Mechanical Properties ◽  
Polymer Composite ◽  
Thick Films ◽  
Aerosol Deposition

Infrared Optical and Mechanical Properties of Ceramic Coatings Fabricated by Aerosol Deposition

2012 ◽  
Vol 2012 (CICMT) ◽  
pp. 000406-000410
Author(s):  
Hiroki TSUDA ◽  
Jun AKEDO ◽  
Shingo HIROSE ◽  
Keishi OHASHI
Keyword(s):  
Mechanical Properties ◽  
Room Temperature ◽  
Aerosol Deposition ◽  
Ceramic Coatings ◽  
Barium Fluoride ◽  
Optical Components ◽  
Practical Applications ◽  
Mechanical Hardness ◽  
Additional Layer ◽  
Optical And Mechanical Properties

The possibility and mechanical improvement of the infrared ceramic coatings fabricated on fluoride substrates at room temperature by aerosol deposition (AD) were investigated aiming to optical components for infrared applications and devices. The yttria coating possibility fabricated on barium fluoride substrates by the AD process was found by adjusting one of the deposition conditions. The optical and mechanical properties of the fabricated ceramic coatings, which are important in practical applications, were evaluated by transmittance and hardness measurements respectively. The mechanical hardness of the fabricated yttria single coatings was increased to 4 times higher than that of the barium fluoride substrates. Furthermore, by an additional layer on a barium fluoride substrate, the mechanical properties of the fabricated multi-coatings including an upper yttria layer were improved from that of the single yttria coating on the barium fluoride substrate, retaining the IR transmittance of the single yttria coating at the wavelength of 10μm.

Stress, Mechanical Properties and Composition Measurements in Sputtered Thick Alumina Films

1993 ◽  
Vol 308 ◽  
Author(s):  
C. A. Ross ◽  
J. J. Barrese
Keyword(s):  
Mechanical Properties ◽  
Elastic Modulus ◽  
Deposition Rate ◽  
Etch Rate ◽  
Gas Pressure ◽  
Substrate Bias ◽  
Zero Bias ◽  
Alumina Films ◽  
Argon Content ◽  
Composition Measurements

ABSTRACTThick r.f.-sputtered alumina is used as an overcoat material in microelectronic applications. The stress in the material is compressive and its magnitude is influenced by the sputtering conditions including the power, gas pressure and r.f. substrate bias. These parameters also affect the deposition rate, stoichiometry and sputter gas (argon) content of the material and its etch rate in hydroxide solutions. Nanoindentation measurements of the elastic modulus and hardness are presented for alumina sputtered under different bias conditions and show that the zero bias material appears to be harder and suffer than material deposited at -100V bias.

Mechanical Properties of Free-Standing Porous Anodic Alumina Films

2013 ◽  
Vol 200 ◽  
pp. 54-59
Author(s):  
Eugene Ignashev ◽  
Vladimir Shulgov
Keyword(s):  
Mechanical Properties ◽  
Flexural Strength ◽  
Film Thickness ◽  
Pure Aluminum ◽  
Heat Removal ◽  
Anodic Alumina ◽  
Porous Anodic Alumina ◽  
Free Standing ◽  
Alumina Films ◽  
The One

The flexural strength and microhardness of free-standing anodic alumina films obtained from the one-sided anodization of aluminum are discussed. The films formed of high-pure aluminum were shown to have maximum flexural strength. Even a small amount of impurities decreases the flexural strength of the resulting free-standing anodic alumina films to be associated with their higher defectiveness. The microhardness of thick films of anodic alumina measured on the side of a barrier layer is independent of the film thickness, and this measured on the side of the porous layer decreases continuosly from 5.39-5.88 GPa to 2.94 GPa when the film thickness increases from 50 to 500 μm. The microhardness of thin (<100 μm) films of porous anodic alumina was studied as well. When the samples were immovable in the electrolyte during the anodization, the microhardness of the resulting films is low and varies from 0.93 to 1.86 GPa. When the samples moved in the electrolyte occasionally during the anodization, the microhardness of the resulting films increases to 1.67 – 2.45 GPa. When the samples moved in the electrolyte continuously during the anodization, the microhardness of the resulting films increases to 2.45 - 3.43 GPa. This is associated with the rate of the heat removal from the sample (the oxidation rate) during the anodization. The microhardness of the free-standing porous anodic alumina films formed of low binary alloys of aluminum is lower than one of films formed of high-pure aluminum.

Stress stability and thermo-mechanical properties of reactively sputtered alumina films

2005 ◽  
Vol 40 (24) ◽  
pp. 6345-6355 ◽  
Author(s):  
M. P. Hughey ◽  
R. F. Cook ◽  
J. Thurn
Keyword(s):  
Mechanical Properties ◽  
Alumina Films

scholarly journals The mechanical properties of thin alumina films deposited by metal-organic chemical vapour deposition

1995 ◽  
Vol 254 (1-2) ◽  
pp. 153-163 ◽  
Author(s):  
V.A.C. Haanappel ◽  
D.v.d. Vendel ◽  
H.S.C. Metselaar ◽  
H.D. van Corbach ◽  
T. Fransen ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Organic Chemical ◽  
Alumina Films ◽  
Metal Organic
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