Characteristics of atomic layer deposited transparent aluminum-doped zinc oxide thin films at low temperature
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2015 ◽
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2010 ◽
Vol 207
(11)
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pp. 2487-2491
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2017 ◽
Vol 28
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pp. 15647-15656
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2019 ◽
Vol 203
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pp. 110161
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Vol 24
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pp. 5091-5096
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1995 ◽
Vol 78
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pp. 1931-1934
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2020 ◽
Vol 124
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pp. 26780-26792
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