Substrate-Dependent Growth Behavior of Atomic-Layer-Deposited Zinc Oxide and Zinc Tin Oxide Thin Films for Thin-Film Transistor Applications
2020 ◽
Vol 124
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pp. 26780-26792
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pp. 7829-7836
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2018 ◽
Vol 58
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pp. 328-333
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pp. 21328-21337
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