Adhesive Mechanism of Al2O3/Cu Composite Film via Aerosol Deposition Process for Application of Film Resistor

2019 ◽  
Vol 15 (2) ◽  
pp. 227-237 ◽  
Author(s):  
Myung-Yeon Cho ◽  
Dong-Won Lee ◽  
Pil-Ju Ko ◽  
Sang-Mo Koo ◽  
Jaesik Kim ◽  
...  

2016 ◽  
Vol 27 (8) ◽  
pp. 8567-8572 ◽  
Author(s):  
Jin Hyeon Kim ◽  
Hong-Ki Kim ◽  
Seung-Hwan Lee ◽  
Sung-Gap Lee ◽  
Jae-Sik Kim ◽  
...  


2018 ◽  
Vol 87 (2) ◽  
pp. 136-143 ◽  
Author(s):  
Kentaro SHINODA ◽  
Takanori SAEKI ◽  
Jun AKEDO


2018 ◽  
Vol 57 (11S) ◽  
pp. 11UF05 ◽  
Author(s):  
Myung-Yeon Cho ◽  
Dong-Won Lee ◽  
Ik-Soo Kim ◽  
Won-Ho Lee ◽  
Je-Wook Yoo ◽  
...  




2019 ◽  
Vol 370 ◽  
pp. 269-287 ◽  
Author(s):  
A. Zabihi Yeganeh ◽  
M. Jadidi ◽  
C. Moreau ◽  
A. Dolatabadi


2000 ◽  
Vol 15 (11) ◽  
pp. 2292-2295 ◽  
Author(s):  
Young-Joon Park ◽  
Young-Joon Baik ◽  
Jae Hyoung Choi ◽  
Jeong Yong Lee ◽  
Jun-Hee Hahn

BN films consisting of c-BN and h-BN phases were synthesized using an ion-beam-assisted deposition process. In contrast to conventional observations, the c-BN and h-BN phases did not form separate layers, but were distributed in the form of nano-sized grains throughout the film thickness. No distinctly aligned h-BN layer was observed before the c-BN phase. Such a mixed character of the film was attributed to a localized ion bombardment effect instead of the macro-stress. Possibly because of the presence of scattered h-BN phases, the thin film described here possessed a low hardness of about 20 GPa and a low stress of about 5 GPa, compared with other reported c-BN-containing films.



1989 ◽  
Vol 169 ◽  
Author(s):  
A. Driessen ◽  
Q. Tang ◽  
L. Hilderink ◽  
Th.J.A. Popma

AbstractThin film production by aerosol deposition is a simple, non‐vacuum method, which under certain conditions of the process parameters, can be considered as a chemical vapor deposition (CVD) process. In this paper we describe the formation of superconducting thin films by aerosol deposition in the CVD regime by using metal‐organic precursors. The best results were obtained with the metal β‐diketonates of Y, Ba and Cu dissolved in butylacetate. This solution was nebulized and sprayed on a heated Si‐substrate with a Zr02‐buffer layer at a temperature of 450 C. After deposition a final heat treatment at a temperature of 800 C was applied. The resulting superconducting film has a Tc>2ero of 75 K.





2006 ◽  
Vol 301 ◽  
pp. 117-120
Author(s):  
Mihoko Momotani ◽  
Naoko Mori ◽  
Song Min Nam ◽  
Hirofumi Kakemoto ◽  
Satoshi Wada ◽  
...  

In order to fabricate a microstrip band pass filter in GHz region as a passive component of RF modules, Al2O3 thick films were prepared on Cu metal substrates by AD (Aerosol Deposition) process. The dimensions of the filters were determined by the high frequency electromagnetic analysis. The filters were successfully fabricated on AD-derived Al2O3 thick films by employing sputtering, photolithography, electroplating and chemical etching processes. Their filtering characteristics were examined by a Network Analyzer. Through this work, we suggest that the AD process will be important the fabrication technology for integrated RF modules.



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