Hybrid Aerosol Deposition Process for Ceramic Coatings

2018 ◽  
Vol 87 (2) ◽  
pp. 136-143 ◽  
Author(s):  
Kentaro SHINODA ◽  
Takanori SAEKI ◽  
Jun AKEDO
Actuators ◽  
2020 ◽  
Vol 9 (3) ◽  
pp. 59
Author(s):  
Deepak Rajaram Patil ◽  
Venkateswarlu Annapureddy ◽  
J. Kaarthik ◽  
Atul Thakre ◽  
Jun Akedo ◽  
...  

Conventional thin-film processing techniques remain inadequate for obtaining superior dense ceramic thick films. The incompatibility of ceramic films prepared via other methods, such as screen printing, spin coating, and sputtering, is a major obstacle in the fabrication of thick film-based ceramic electronic components. The granule spray in vacuum (GSV) processes and aerosol deposition (AD) are important coating approaches for forming dense ceramic thick films featuring nanoscale crystallite structures at room temperature, which offer excellent material properties and facilitate cost-effective production. AD ceramic coatings require the acceleration of solid-state submicron ceramic particles via gas streams with a velocity of a few hundred meters per second, which are then wedged onto a substrate. This process is economical and particularly useful for the fabrication of piezoelectric thick film-based microactuators, energy harvesters, sensors, and optoelectronic devices. More recently, the GSV technique was improved to achieve more uniform and homogeneous film deposition after AD. This review article presents a detailed overview of the AD and GSV processes for piezoelectric thick films in terms of recent scientific and technological applications.


2018 ◽  
Vol 57 (11S) ◽  
pp. 11UF05 ◽  
Author(s):  
Myung-Yeon Cho ◽  
Dong-Won Lee ◽  
Ik-Soo Kim ◽  
Won-Ho Lee ◽  
Je-Wook Yoo ◽  
...  

2012 ◽  
Vol 2012 (CICMT) ◽  
pp. 000406-000410
Author(s):  
Hiroki TSUDA ◽  
Jun AKEDO ◽  
Shingo HIROSE ◽  
Keishi OHASHI

The possibility and mechanical improvement of the infrared ceramic coatings fabricated on fluoride substrates at room temperature by aerosol deposition (AD) were investigated aiming to optical components for infrared applications and devices. The yttria coating possibility fabricated on barium fluoride substrates by the AD process was found by adjusting one of the deposition conditions. The optical and mechanical properties of the fabricated ceramic coatings, which are important in practical applications, were evaluated by transmittance and hardness measurements respectively. The mechanical hardness of the fabricated yttria single coatings was increased to 4 times higher than that of the barium fluoride substrates. Furthermore, by an additional layer on a barium fluoride substrate, the mechanical properties of the fabricated multi-coatings including an upper yttria layer were improved from that of the single yttria coating on the barium fluoride substrate, retaining the IR transmittance of the single yttria coating at the wavelength of 10μm.


2019 ◽  
Vol 12 (05) ◽  
pp. 1930005 ◽  
Author(s):  
Michaela Schubert ◽  
Dominik Hanft ◽  
Tobias Nazarenus ◽  
Jörg Exner ◽  
Michael Schubert ◽  
...  

The Aerosol Deposition (AD) method is a dry spray coating process for the production of dense ceramic coatings at room temperature directly from the ceramic raw powder. In order to avoid confusion with liquid aerosol technology, the term powder aerosol deposition (PAD) is introduced here, to highlight that the aerosol consists only of ceramic powder and carrier gas. Especially in the field of functional ceramics, PAD is a promising alternative to conventional sinter-based production processes. This review focuses on the PAD of functional ceramics in the field of sensing and energy technology. In this context, especially current developments and trends are presented. On the part of the sensors, gas and temperature sensors are especially considered, whereas in the field of energy technology, the focus is on vibration energy harvesting, thermoelectric generators, superconductors, and solar cells as well as on all solid-state batteries and fuel cells. Besides the different applications of PAD films, this review also highlights opportunities for influencing the film properties by the used powder or the process parameters.


2019 ◽  
Vol 370 ◽  
pp. 269-287 ◽  
Author(s):  
A. Zabihi Yeganeh ◽  
M. Jadidi ◽  
C. Moreau ◽  
A. Dolatabadi

2008 ◽  
Vol 368-372 ◽  
pp. 1297-1299
Author(s):  
Xin Xing ◽  
Lin Liu ◽  
Xiao Zhong Huang ◽  
Xiao Dong Li

Silicon carbide coatings on graphite were prepared through polymer vapor pyrolysis deposition process (PVPD) under N2 atmosphere. During this process, some low molecular weight substances that polycarbosilane (PCS) pyrolyzed can be deposited on graphite, and they can convert into SiC in high temperature. The results of XRD showed that amorphous SiC coatings were formed on graphite when the pyrolysis temperature was 1000°C, andβ-SiC phase formed in the coatings when the temperature up to 1250°C. Effects of the coatings on the microstructure and properties were investigated. It was shown that the uniform dense SiC coatings could be obtained by carefully controlling the pyrolysis temperature and ramping rate when the number molecular weight of PCS was in the range of 1,000~1,500.


1989 ◽  
Vol 169 ◽  
Author(s):  
A. Driessen ◽  
Q. Tang ◽  
L. Hilderink ◽  
Th.J.A. Popma

AbstractThin film production by aerosol deposition is a simple, non‐vacuum method, which under certain conditions of the process parameters, can be considered as a chemical vapor deposition (CVD) process. In this paper we describe the formation of superconducting thin films by aerosol deposition in the CVD regime by using metal‐organic precursors. The best results were obtained with the metal β‐diketonates of Y, Ba and Cu dissolved in butylacetate. This solution was nebulized and sprayed on a heated Si‐substrate with a Zr02‐buffer layer at a temperature of 450 C. After deposition a final heat treatment at a temperature of 800 C was applied. The resulting superconducting film has a Tc>2ero of 75 K.


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