Increased single crystal length in low-pressure, LEC gallium arsenide

1991 ◽  
Vol 109 (1-4) ◽  
pp. 218-223 ◽  
Author(s):  
Hunter D. Marshall
2008 ◽  
Author(s):  
Shinzo Yoshikado ◽  
Shinji Fukao ◽  
Yoshikazu Nakanishi ◽  
Tadahiro Mizoguchi ◽  
Yoshiaki Ito ◽  
...  
Keyword(s):  

1993 ◽  
Vol 46 (3) ◽  
pp. 435
Author(s):  
C Jagadish ◽  
A Clark ◽  
G Li ◽  
CA Larson ◽  
N Hauser ◽  
...  

Undoped and doped layers of gallium arsenide and aluminium gallium arsenide have been grown on gallium arsenide by low-pressure metal organic vapour-phase epitaxy (MOVPE). Delta doping and growth on silicon substrates have also been attempted. Of particular interest in the present study has been the influence of growth parameters, such as growth temperature, group III mole fraction and dopant flow, on the electrical and physical properties of gallium arsenide layers. An increase in growth temperature leads to increased doping efficiency in the case of silicon, whereas the opposite is true in the case of zinc. Deep level transient spectroscopy (DTLS) studies on undoped GaAs layers showed two levels, the expected EL2 level and a carbon-related level. The determination of optimum growth conditions has allowed good quality GaAs and AlGaAs epitaxial layers to be produced for a range of applications.`


2020 ◽  
Vol 62 ◽  
pp. 71-82 ◽  
Author(s):  
Junyun Chen ◽  
Fei Ding ◽  
Xichun Luo ◽  
Xiaoshuang Rao ◽  
Jining Sun

2002 ◽  
Vol 29 (4) ◽  
pp. 537-540
Author(s):  
N.F. Chen ◽  
X.R. Zhong ◽  
M. Zhang ◽  
L.Y. Lin

2015 ◽  
Vol 44 (46) ◽  
pp. 19796-19799 ◽  
Author(s):  
Min-Min Liu ◽  
Yan-Lin Bi ◽  
Qin-Qin Dang ◽  
Xian-Ming Zhang

Reversible crystal transformation was observed between a mononuclear complex to a fourfold interpenetrated MOF with selective adsorption of CO2 up to 12.5 wt% at room temperature and low pressure.


1985 ◽  
Vol 47 (11) ◽  
pp. 1187-1189 ◽  
Author(s):  
J. P. Harbison ◽  
D. M. Hwang ◽  
J. Levkoff ◽  
G. E. Derkits

1992 ◽  
Vol 70 (10-11) ◽  
pp. 893-897
Author(s):  
C. Aktik ◽  
J. Beerens ◽  
S. Blain ◽  
A. Bsiesy

The low-pressure metal-organic chemical vapour deposition (LPMOCVD) technique has been investigated previously as a growth method for compound semiconductors, offering the possibility of selective epitaxy and the potential advantage of better controllability for changing the doping level and the alloy composition. Low-temperature growth is also desirable to reduce the carbon incorporation generated by the decomposition of the organic radicals. In this article we report for the first time the epitaxial growth of gallium arsenide (GaAs) by LPMOCVD at temperatures as low as 510 °C. The vertical reactor that was developed by the authors employs conventional precursors such as trimethylgallium and arsine. By carefully choosing the growth parameters, we were able to grow high-quality GaAs epilayers with good surface morphology at temperatures as low as 510 °C. The carbon incorporation is shown to decrease with decreasing growth temperature without deterioration of the film quality. By carefully controlling the purity of the sources and the gas flow dynamics, we reduced the deep level impurity concentration and obtained reproducible n-type material with residual net donor concentration of 4.4 × 1014 cm−3 and mobility of 92 000 cm2 V−1 s−1 at 77 K.


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