Thin-film thermocouple gauge

Vacuum ◽  
1989 ◽  
Vol 39 (5) ◽  
pp. 490
Keyword(s):  
Thin Film ◽  
Thin Film Thermocouple

A New Scanning Thermal Microprobe

1997 ◽  
Vol 503 ◽  
Author(s):  
Yongxia Zhang ◽  
Yanwei Zhang ◽  
Juliana Blaser ◽  
T. S. Sriiram ◽  
R. B. Marcus
Keyword(s):  
Thin Film ◽  
High Resolution ◽  
Thermal Response ◽  
Temperature Sensing ◽  
Thermal Sensor ◽  
Atomic Force ◽  
Thin Film Thermocouple ◽  
Processing Steps ◽  
Thermocouple Junction

ABSTRACTA thermal microprobe has been designed and built for high resolution temperature sensing. The thermal sensor is a thin-film thermocouple junction at the tip of an Atomic Force Microprobe (AFM) silicon probe needle. Only wafer-stage processing steps are used for the fabrication. The thermal response over the range 25–s 4.5–rovolts per degree C and is linear.

Peltier effect in a co-evaporated Sb2Te3(P)-Bi2Te3(N) thin film thermocouple

2002 ◽  
Vol 408 (1-2) ◽  
pp. 270-274 ◽  
Author(s):  
Helin Zou ◽  
D.M. Rowe ◽  
S.G.K. Williams
Keyword(s):  
Thin Film ◽  
Peltier Effect ◽  
Thin Film Thermocouple

scholarly journals Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering

AIP Advances ◽  
2017 ◽  
Vol 7 (11) ◽  
pp. 115025 ◽  
Author(s):  
Yantao Liu ◽  
Wei Ren ◽  
Peng Shi ◽  
Dan Liu ◽  
Ming Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Thin Film Thermocouple

Development of Multilayer Composition Thin Film Thermocouple Cutting Temperature Sensor Based on Magnetron Sputtering

2009 ◽  
Vol 69-70 ◽  
pp. 515-519 ◽  
Author(s):  
Yun Xian Cui ◽  
Bao Yuan Sun ◽  
W.Y. Ding ◽  
F.D. Sun
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
High Speed ◽  
Cutting Temperature ◽  
High Speed Steel ◽  
Plasma Source ◽  
Cutting Edge ◽  
Static Calibration ◽  
Ecr Plasma ◽  
Thin Film Thermocouple

In the paper, a new multilayer composition thin film thermocouple was developed, which can accurately measure the temperature nearby cutting edge in convenient and fast ways. By means of advanced Twinned microwave ECR plasma source enhanced Radio Frequency (RF) reaction non-balance magnetron sputtering technique, SiO2 insulating film, NiCr/NiSi sensor film and SiO2 protecting film were deposited on the surface HSS substrate. Both static calibration and dynamic calibration were completed. The results showed that the sensor had good performance, good linearity, quick dynamic response, response time constant was 12.7ms. The temperature near the cutting edge in cutting process of aluminum alloy was measured by the developed sensor. The bonding strength between multiple layer film and substrate of high-speed-steel met the presupposed demands.

Design, Fabrication, and Characterization of a Pt/Au Thin-Film Thermocouple Array

2020 ◽  
Vol 20 (12) ◽  
pp. 6287-6294
Author(s):  
Jiong Ding ◽  
Jiayin Wang ◽  
Qiyue Xu ◽  
Suijun Yang ◽  
Shuliang Ye
Keyword(s):  
Thin Film ◽  
Thin Film Thermocouple ◽  
Fabrication And Characterization ◽  
Au Thin Film

scholarly journals Indium Tin Oxide Thin-Film Thermocouple Probe Based on Sapphire Microrod

Sensors ◽  
2020 ◽  
Vol 20 (5) ◽  
pp. 1289 ◽  
Author(s):  
Jinjun Deng ◽  
Linwei Zhang ◽  
Liuan Hui ◽  
Xinhang Jin ◽  
Binghe Ma
Keyword(s):  
Thin Film ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Gas Turbines ◽  
Oxide Thin Film ◽  
Main Challenge ◽  
Thin Film Thermocouple ◽  
Thin Film Thermocouples ◽  
Thermocouple Probe

Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

Development of Cutting Tools with Built-in Thin Film Thermocouple for Monitoring Machining Temperature

2011 ◽  
Vol 189-193 ◽  
pp. 3170-3174
Author(s):  
Qi Yong Zeng ◽  
Xiao Feng Zheng ◽  
Gao Hui Zhang ◽  
Le Chen
Keyword(s):  
Thin Film ◽  
Cubic Boron Nitride ◽  
Cutting Tools ◽  
Vital Role ◽  
Polycrystalline Cubic Boron Nitride ◽  
Thin Film Thermocouple ◽  
Thin Film Thermocouples ◽  
Pcbn Tools ◽  
Deposition Conditions

Temperature plays a vital role in the machining industry today. NiCr/NiSi thin-film thermocouples have been deposited on the rake face of polycrystalline cubic boron nitride (PCBN) tools by magnetron sputtering. The typical deposition conditions are summarized. Static and dynamic calibrations of the NiCr/NiSi thin-film thermocouples are presented. The Seebeck coefficient of the TFTC is 37.3 μV/°C. The response time is about 3.9 ms. The testing results indicate that the developed NiCr/NiSi thin-film thermocouple sensors perform excellently when machining A3 steel in situ.

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