Evidence for intrinsic point defect generation during hydrogen-plasma treatment of silicon
1991 ◽
Vol 170
(1-4)
◽
pp. 218-222
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2020 ◽
Vol 25
(2)
◽
pp. 171-185
2019 ◽
Vol 11
(5)
◽
pp. 05002-1-05002-7
Keyword(s):
Keyword(s):
Keyword(s):
1990 ◽
Vol 46
(1-4)
◽
pp. 435-440
◽
Keyword(s):