Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles

2010 ◽  
Vol 257 (1) ◽  
pp. 186-191 ◽  
Author(s):  
A.P. Alekhin ◽  
S.A. Gudkova ◽  
A.M. Markeev ◽  
A.S. Mitiaev ◽  
A.A. Sigarev ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Structural Properties ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Dioxide Thin Films ◽  
Reaction Cycles

Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe)3 and Ozone

2009 ◽  
Vol 113 (52) ◽  
pp. 21825-21830 ◽  
Author(s):  
Martin Rose ◽  
Jaakko Niinistö ◽  
Pawel Michalowski ◽  
Lukas Gerlich ◽  
Lutz Wilde ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Dioxide Thin Films ◽  
Cp Ti

scholarly journals Titanium dioxide thin films by atomic layer deposition: a review

2017 ◽  
Vol 32 (9) ◽  
pp. 093005 ◽  
Author(s):  
Janne-Petteri Niemelä ◽  
Giovanni Marin ◽  
Maarit Karppinen
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Dioxide Thin Films

Titanium Dioxide Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition for OLED Passivation

2008 ◽  
Vol 8 (9) ◽  
pp. 4726-4729 ◽  
Author(s):  
Woong-Sun Kim ◽  
Myoung-Gyun Ko ◽  
Tae-Sub Kim ◽  
Sang-Kyun Park ◽  
Yeon-Keon Moon ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Transmission Rate ◽  
Atomic Layer ◽  
Titanium Dioxide Film ◽  
Uncoated Sample ◽  
Layer Deposition ◽  
Titanium Dioxide Thin Films ◽  
Dioxide Film

Plasma enhanced atomic layer deposition (PEALD) of titanium dioxide thin films was conducted using Tetrakis dimethylamino titanium (TDMATi) and an oxygen plasma on a polyethersulfon (PES) substrate at a deposition temperature of 90 °C. The effects of the induced plasma power on passivation properties were investigated according to film thickness. The growth rate of the titanium dioxide film was 0.8 Å/cycle, and the water vapor transmission rate (WTVR) for a 80 nm titanium dioxide film was 0.023 g/m2·day. The passivation performance of the titanium dioxide film was investigated using an organic light-emitting diode (OLED). The coated OLED lifetime was 90 h, 15 times longer than that of an uncoated sample.

Correlation between bioactivity and structural properties of titanium dioxide coatings grown by atomic layer deposition

2012 ◽  
Vol 258 (8) ◽  
pp. 3415-3419 ◽  
Author(s):  
I.P. Grigal ◽  
A.M. Markeev ◽  
S.A. Gudkova ◽  
A.G. Chernikova ◽  
A.S. Mityaev ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Structural Properties ◽  
Atomic Layer ◽  
Layer Deposition
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