Recovery of clean ordered (111) surface of etched silicon

2013 ◽  
Vol 282 ◽  
pp. 156-160 ◽  
Author(s):  
A.M.C. Ng ◽  
L. Dong ◽  
W.K. Ho ◽  
A.B. Djurišić ◽  
M.H. Xie ◽  
...  
Keyword(s):  
1994 ◽  
Vol 3 (3) ◽  
pp. 182-186
Author(s):  
June M. Epp

1992 ◽  
Vol 42-44 ◽  
pp. 1303-1308 ◽  
Author(s):  
X. Zheng ◽  
J. Hetrick ◽  
S.-T. Yau ◽  
M.H. Nayfeh

Author(s):  
Mehdi Nikkhah ◽  
Jeannine S. Strobl ◽  
Bhanu Peddi ◽  
Adedamola Omotosho ◽  
Masoud Agah

In this paper we are investigating three dimensional (3-D) silicon-based microenvironments as potential platforms for breast cancer diagnostics. We have developed isotropically etched microstructures with a wide range of geometrical patterns for this purpose. Our results indicate that with the etched surface ratio of ∼65%, it is possible to capture 80–90% of the cancer cells within each silicon chip. After treatment of the cells with mitomycin C (to block the cell growth) more number of the cells are trapped inside the etched features for longer cultures times (72 h) suggesting that there is a directed motility and attraction of the cells toward the etched cavities and by optimally designing the etched features, the proposed platforms can be potentially used for diagnostics purposes.


1989 ◽  
Vol 111 (2) ◽  
pp. 112-120 ◽  
Author(s):  
N. Wright ◽  
B. Gebhart

New results are presented for pool boiling from vertical, smooth and regularly microconfigured etched silicon surfaces, in saturated water at 1 atm. All specimens were 1.27 cm square and approximately 300 μm thick. The etched microstructures were hexagonal dimples and rectangular trenches. The dimples were 4.1 μm deep and 11.5 μm across, on 22 μm centers. The trenches were 51 μm deep, 12.6 μm wide and 101 μm long, with repeat distances of 22 and 110 μm, in the two directions. The surface densities of the microstructures were 2 × 105 per cm2 for the dimples and 0.4 × 105 per cm2 for the trenches. Electrical heating was accomplished by applying an electrical potential across the phosphorous doped dry side of the silicon specimen substrate. The hexagonally dimpled specimen in the nominal nucleate pool boiling region had heat transfer increased by a factor of 4.2 over that of the smooth specimens. The heat transfer enhancement was a factor of 3.1 over the smooth specimen data, for the trenched specimen data. In the nominally convective-vaporization regime, both the smooth and microconfigured specimens had as much as 5 times the heat transfer compared to a uniform flux natural convection correlation. Comparable heat transfer measurements in subcooled water verified the experimental procedure and also indicated that only a small fraction of this large enhancement may be explained by edge effects, on these small heaters.


2006 ◽  
Vol 83 (1) ◽  
pp. 12-16 ◽  
Author(s):  
J.H. Xia ◽  
Rusli ◽  
S.F. Choy ◽  
R. Gopalakrishan ◽  
C.C. Tin ◽  
...  

1993 ◽  
Vol 298 ◽  
Author(s):  
T. Lin ◽  
M. E. Sixta ◽  
J. N. Cox ◽  
M. E. Delaney

AbstractThe optical properties of both electrochemically anodized and chemically stain-etched porous silicon are presented. Fourier transform infrared (FTIR) spectroscopy showed that absorbance in stain-etched samples was 3x and 1.7x greater than in anodized samples for the SiH/SiH2 stretch and scissors-bending modes, respectively. Also, oxygen is detected in stain-etched samples immediately after formation, unlike anodized samples. Photoluminescence measurements showed different steady state characteristics. Electrochemical-etched silicon samples stored in air increased in photoluminescent intensity over time, unlike the stain-etched samples. A photoluminescent device made by anodization on epitaxial p-type material (0.4 Ωm) on n-type substrate (0.1 Ω-cm) did not exhibit electroluminescence.


Author(s):  
Chenhui Li ◽  
Barry Smalbrugge ◽  
Tjibbe de Vries ◽  
Ripalta Stabile ◽  
Oded Raz
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