Finite element simulation of the effects of process parameters on deposition uniformity of chemical-vapor-deposited silicon carbide
2009 ◽
Vol 46
(4)
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pp. 1002-1006
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2021 ◽
Vol 1065
(1)
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pp. 012036
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2020 ◽
Vol 33
(1)
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2011 ◽
Vol 675-677
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pp. 921-924
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2018 ◽
Vol 30
(3)
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pp. 259-265
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2003 ◽
Vol 70
(3-4)
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pp. 553-566
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2009 ◽
Vol 610-613
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pp. 635-640
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2008 ◽
Vol 56
(15)
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pp. 3824-3832
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2004 ◽
Vol 12
(2)
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pp. 285-291
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2018 ◽
Vol 96
(9-12)
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pp. 3481-3501
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