Low temperature growth kinetics of high Ge content SiGe in reduced pressure-chemical vapor deposition
2007 ◽
Vol 305
(1)
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pp. 113-121
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2005 ◽
Vol 274
(1-2)
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pp. 28-37
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2006 ◽
Vol 45
(6A)
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pp. 5329-5331
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2002 ◽
Vol 14
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pp. 215-218
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2000 ◽
Vol 18
(4)
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pp. 1590-1594
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