Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films

2021 ◽  
pp. 126264
Author(s):  
Liangge Xu ◽  
Zhibo Zhang ◽  
Lei Yang ◽  
Jinye Yang ◽  
Peng Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Thermal Plasma ◽  
Atomic Layer ◽  
Layer By Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Ar Plasma

scholarly journals Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

2017 ◽  
Vol 35 (4) ◽  
pp. 041506 ◽  
Author(s):  
Jere Tupala ◽  
Marianna Kemell ◽  
Miika Mattinen ◽  
Kristoffer Meinander ◽  
Sanni Seppälä ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Reaction Mechanisms of the Atomic Layer Deposition of Tin Oxide Thin Films Using Tributyltin Ethoxide and Ozone

Langmuir ◽  
2017 ◽  
Vol 33 (24) ◽  
pp. 5998-6004 ◽  
Author(s):  
Charith E. Nanayakkara ◽  
Guo Liu ◽  
Abraham Vega ◽  
Charles L. Dezelah ◽  
Ravindra K. Kanjolia ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Reaction Mechanisms ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Atomic Layer Deposition of Indium Tin Oxide Thin Films Using Nonhalogenated Precursors

2008 ◽  
Vol 112 (6) ◽  
pp. 1938-1945 ◽  
Author(s):  
Jeffrey W. Elam ◽  
David A. Baker ◽  
Alex B. F. Martinson ◽  
Michael J. Pellin ◽  
Joseph T. Hupp
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition

2005 ◽  
Vol 15 (4) ◽  
pp. 275-280
Author(s):  
Hie-Chul Kim ◽  
Min-Wan Kim ◽  
Hyung-Su Kim ◽  
Hyug-Jong Kim ◽  
Woo-Keun Sohn ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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