Band structure of amorphous zinc tin oxide thin films deposited by atomic layer deposition

2018 ◽  
Vol 58 ◽  
pp. 328-333 ◽  
Author(s):  
Sunyoung Lee ◽  
Sungjoon Kim ◽  
Seokhee Shin ◽  
Zhenyu Jin ◽  
Yo-Sep Min
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Band Structure ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Zinc Tin Oxide

Nonlinear growth of zinc tin oxide thin films prepared by atomic layer deposition

2021 ◽  
Author(s):  
Yang Gu ◽  
Jia-Jia Tao ◽  
Tao Wang ◽  
Yu-Hang Liu ◽  
Bo-Fang Peng ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Nonlinear Growth ◽  
Layer Deposition ◽  
Zinc Tin Oxide

scholarly journals Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

2017 ◽  
Vol 35 (4) ◽  
pp. 041506 ◽  
Author(s):  
Jere Tupala ◽  
Marianna Kemell ◽  
Miika Mattinen ◽  
Kristoffer Meinander ◽  
Sanni Seppälä ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Reaction Mechanisms of the Atomic Layer Deposition of Tin Oxide Thin Films Using Tributyltin Ethoxide and Ozone

Langmuir ◽  
2017 ◽  
Vol 33 (24) ◽  
pp. 5998-6004 ◽  
Author(s):  
Charith E. Nanayakkara ◽  
Guo Liu ◽  
Abraham Vega ◽  
Charles L. Dezelah ◽  
Ravindra K. Kanjolia ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Reaction Mechanisms ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Atomic Layer Deposition of Indium Tin Oxide Thin Films Using Nonhalogenated Precursors

2008 ◽  
Vol 112 (6) ◽  
pp. 1938-1945 ◽  
Author(s):  
Jeffrey W. Elam ◽  
David A. Baker ◽  
Alex B. F. Martinson ◽  
Michael J. Pellin ◽  
Joseph T. Hupp
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors

2004 ◽  
Vol 374 (1-2) ◽  
pp. 124-128 ◽  
Author(s):  
Jani Päiväsaari ◽  
Matti Putkonen ◽  
Timo Sajavaara ◽  
Lauri Niinistö
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Rare Earth Oxides ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Ozone Precursors ◽  
Layer Deposition

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition

2005 ◽  
Vol 15 (4) ◽  
pp. 275-280
Author(s):  
Hie-Chul Kim ◽  
Min-Wan Kim ◽  
Hyung-Su Kim ◽  
Hyug-Jong Kim ◽  
Woo-Keun Sohn ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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