Multiple internal reflection Fourier transform-infrared spectroscopy study on Si surface for measurement of PSL particles

2009 ◽  
Vol 15 (5) ◽  
pp. 763-766 ◽  
Author(s):  
Jahyun Yang ◽  
Kyungtaek Im ◽  
Juneyoung Lee ◽  
Sangwoo Lim
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