A simple route to prepare (100) preferred orientation indium tin oxide film onto polyimide substrate by direct current pulsed magnetron sputtering

2018 ◽  
Vol 209 ◽  
pp. 38-45 ◽  
Author(s):  
Zhixuan Lv ◽  
Jindong Liu ◽  
Dengyao Wang ◽  
Hualong Tao ◽  
Weichao Chen ◽  
...  
Keyword(s):  
Oxide Film ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Preferred Orientation ◽  
Simple Route ◽  
Polyimide Substrate ◽  
Pulsed Magnetron

Plasma influence on the properties and structure of indium tin oxide films produced by reactive middle frequency pulsed magnetron sputtering

2006 ◽  
Vol 496 (2) ◽  
pp. 197-204 ◽  
Author(s):  
A. Rogozin ◽  
M. Vinnichenko ◽  
N. Shevchenko ◽  
A. Kolitsch ◽  
W. Möller
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Tin Oxide Films ◽  
Pulsed Magnetron

Electric Resistance Change Mechanism of Indium-Tin Oxide Film During Deposition of Dielectric Oxide Films by RF Magnetron Sputtering

1988 ◽  
Vol 27 (Part 1, No. 6) ◽  
pp. 1088-1091 ◽  
Author(s):  
Tomizo Matsuoka ◽  
Jun Kuwata ◽  
Masahiro Nishikawa ◽  
Yosuke Fujita ◽  
Takao Tohda ◽  
...  
Keyword(s):  
Oxide Film ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Electric Resistance ◽  
Resistance Change ◽  
Change Mechanism
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