scholarly journals Properties of carbon coatings obtained by pulsed high power methods of vacuum-arc and magnetron sputtering

2018 ◽  
Vol 5 (12) ◽  
pp. 25933-25938
Author(s):  
Alexander I. Poplavsky ◽  
Alexander Ya. Kolpakov ◽  
Marina E. Galkina ◽  
Marina G. Kovaleva ◽  
Maksim N. Japrintsev ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Vacuum Arc ◽  
Carbon Coatings

Pulse methods of strengthening nanocrystalline carbon coatings deposition

2021 ◽  
pp. 93-96
Author(s):  
Yu.V. Panfilov
Keyword(s):  
Magnetron Sputtering ◽  
Pulsed Laser ◽  
Ion Beams ◽  
Film Deposition ◽  
Laser Deposition ◽  
Vacuum Arc ◽  
Amorphous Coating ◽  
Nanostructured Film ◽  
Carbon Coatings ◽  
Pulsed Deposition

The most known methods of pulsed thin strengthening nanostructured film deposition such as magnetron sputtering HiPIMS, pulsed laser deposition PLD, vacuum arc pulsed deposition, high-intensity pulsed ion beams deposition HIPIB, as well, were described and analysed. It was shown that the stream of material, generated by means of a pulsed action, impacts to substrate and creates preconditions for nanocrystalline amorphous coating manufacture with superhigh hardness.

High power impulse magnetron sputtering of diamond-like carbon coatings

2020 ◽  
Vol 38 (4) ◽  
pp. 043408 ◽  
Author(s):  
Tomas Kubart ◽  
Asim Aijaz ◽  
Joakim Andersson ◽  
Fabio Ferreira ◽  
João Carlos Oliveira ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Diamond Like Carbon ◽  
Carbon Coatings

Modeling the high power impulse magnetron sputtering discharge

2020 ◽  
pp. 159-221 ◽  
Author(s):  
Tiberiu Minea ◽  
Tomáš Kozák ◽  
Claudiu Costin ◽  
Jon Tomas Gudmundsson ◽  
Daniel Lundin
Keyword(s):  
Magnetron Sputtering ◽  
High Power

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

2021 ◽  
pp. 138792
Author(s):  
K. Bobzin ◽  
T. Brögelmann ◽  
N.C. Kruppe ◽  
M. Engels ◽  
C. Schulze
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Substrate Bias ◽  
Sputtering Deposition ◽  
Pulsed Magnetron
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