High aspect ratio deep UV wire grid polarizer fabricated by double patterning

2012 ◽  
Vol 98 ◽  
pp. 433-435 ◽  
Author(s):  
T. Weber ◽  
T. Käsebier ◽  
A. Szeghalmi ◽  
M. Knez ◽  
E.-B. Kley ◽  
...  
1983 ◽  
Vol 29 ◽  
Author(s):  
D. V. Podlesnik ◽  
H. H. Gilgen ◽  
R. M. Osgood

ABSTRACTDeep-UV, laser-light-assisted, wet etching of compound semiconductors is reported. As ccmpared to results with visible light, the etching rates per unit power density in the ultraviolet are considerably faster; a factor of >30 is seen under typical conditions. A correlation between the UV absorption in different etching solutions and the light-enhanced etching rates is examined. Gratings with 100-nm resolution have been produced and high-aspect-ratio via-holes have been etched.


2013 ◽  
Vol 26 (5) ◽  
pp. 791-795 ◽  
Author(s):  
So Youn Kim ◽  
Jessica Gwyther ◽  
Ian Manners ◽  
Paul M. Chaikin ◽  
Richard A. Register

Author(s):  
Liling Cho ◽  
David L. Wetzel

Polarized infrared microscopy has been used for forensic purposes to differentiate among polymer fibers. Dichroism can be used to compare and discriminate between different polyester fibers, including those composed of polyethylene terephthalate that are frequently encountered during criminal casework. In the fiber manufacturering process, fibers are drawn to develop molecular orientation and crystallinity. Macromolecular chains are oriented with respect to the long axis of the fiber. It is desirable to determine the relationship between the molecular orientation and stretching properties. This is particularly useful on a single fiber basis. Polarized spectroscopic differences observed from a single fiber are proposed to reveal the extent of molecular orientation within that single fiber. In the work presented, we compared the dichroic ratio between unstretched and stretched polyester fibers, and the transition point between the two forms of the same fiber. These techniques were applied to different polyester fibers. A fiber stretching device was fabricated for use on the instrument (IRμs, Spectra-Tech) stage. Tension was applied with a micrometer screw until a “neck” was produced in the stretched fiber. Spectra were obtained from an area of 24×48 μm. A wire-grid polarizer was used between the source and the sample.


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