Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error

2021 ◽  
pp. 111672
Author(s):  
Mengjia Chen ◽  
Ruifeng Zhu ◽  
Youling Lin ◽  
Zhengqian Zhao ◽  
Lufeng Che
Author(s):  
M.G. Rosenfield

Minimum feature sizes in experimental integrated circuits are approaching 0.5 μm and below. During the fabrication process it is usually necessary to be able to non-destructively measure the critical dimensions in resist and after the various process steps. This can be accomplished using the low voltage SEM. Submicron linewidth measurement is typically done by manually measuring the SEM micrographs. Since it is desirable to make as many measurements as possible in the shortest period of time, it is important that this technique be automated.Linewidth measurement using the scanning electron microscope is not well understood. The basic intent is to measure the size of a structure from the secondary electron signal generated by that structure. Thus, it is important to understand how the actual dimension of the line being measured relates to the secondary electron signal. Since different features generate different signals, the same method of relating linewidth to signal cannot be used. For example, the peak to peak method may be used to accurately measure the linewidth of an isolated resist line; but, a threshold technique may be required for an isolated space in resist.


Author(s):  
Noriyuki Nomoto ◽  
Yoshitomi Okazaki ◽  
Kenji Kuroda ◽  
Shunji Takenoiri ◽  
Toyonobu Yoshida

2019 ◽  
Vol 215 ◽  
pp. 04001 ◽  
Author(s):  
Angelina Müller ◽  
Matthias C. Wapler ◽  
Ulrike Wallrabe

We present a rapid-prototyping process to fabricate aspherical lens arrays based on surface deformation due to thermal expansion of PDMS. Using laser-structuring and molding in combination with an FEM-based shape optimization, we were able to design, fabricate and characterize different micro-lens arrays. This fabrication process can be used for almost any kind of arbitrary lens shape, which allows for a large design freedom for micro lenses.


Sensors ◽  
2021 ◽  
Vol 21 (13) ◽  
pp. 4539
Author(s):  
Roberto de Fazio ◽  
Elisa Perrone ◽  
Ramiro Velázquez ◽  
Massimo De Vittorio ◽  
Paolo Visconti

The evolution of low power electronics and the availability of new smart materials are opening new frontiers to develop wearable systems for medical applications, lifestyle monitoring, and performance detection. This paper presents the development and realization of a novel smart insole for monitoring the plantar pressure distribution and gait parameters; indeed, it includes a piezoresistive sensing matrix based on a Velostat layer for transducing applied pressure into an electric signal. At first, an accurate and complete characterization of Velostat-based pressure sensors is reported as a function of sizes, support material, and pressure trend. The realization and testing of a low-cost and reliable piezoresistive sensing matrix based on a sandwich structure are discussed. This last is interfaced with a low power conditioning and processing section based on an Arduino Lilypad board and an analog multiplexer for acquiring the pressure data. The insole includes a 3-axis capacitive accelerometer for detecting the gait parameters (swing time and stance phase time) featuring the walking. A Bluetooth Low Energy (BLE) 5.0 module is included for transmitting in real-time the acquired data toward a PC, tablet or smartphone, for displaying and processing them using a custom Processing® application. Moreover, the smart insole is equipped with a piezoelectric harvesting section for scavenging energy from walking. The onfield tests indicate that for a walking speed higher than 1 ms−1, the device’s power requirements (i.e., ) was fulfilled. However, more than 9 days of autonomy are guaranteed by the integrated 380-mAh Lipo battery in the total absence of energy contributions from the harvesting section.


Author(s):  
Marshall Quinn ◽  
Ugo Lafont ◽  
Johan Versteegh ◽  
Jian Guo

RSC Advances ◽  
2021 ◽  
Vol 11 (31) ◽  
pp. 18994-18999
Author(s):  
Linzhi Li ◽  
Tianzeng Huang ◽  
Saijun He ◽  
Xing Liu ◽  
Qi Chen ◽  
...  

The fabrication process of the nonenzyme glucose sensing based Cu2+–Cu+/biochar.


Fluids ◽  
2021 ◽  
Vol 6 (3) ◽  
pp. 132
Author(s):  
Jon Gutiérrez ◽  
Virginia Vadillo ◽  
Ainara Gómez ◽  
Joanes Berasategi ◽  
Maite Insausti ◽  
...  

Recently, our collaborative work in the fabrication of a magnetorheological fluid (MRF) containing high magnetization FeCo nanoparticles (NPs, fabricated in our laboratories using the chemical reduction technique; MS = 212 Am2/kg) as magnetic fillers have resulted in a new MRF with superior performance up to 616.7 kA/m. The MRF had a yield stress value of 2729 Pa and good reversibility after a demagnetization process. This value competes with the best ones reported in the most recent literature. Nevertheless, the fabrication process of this type of fluid is not an easy task since there is a strong trend to the aggregation of the FeCo NPs due to the strong magnetic dipolar interaction among them. Thus, now we present the analysis of some aspects concerning the fabrication process of our FeCo NPs containing MRF, mainly the type of surfactant used to cover those NPs (oleic acid or aluminium stearate) and its concentration, and the procedure followed (mechanical and/or ultrasound stirring) to achieve a good dispersion of those magnetic fillers within the fluid.


Sensors ◽  
2021 ◽  
Vol 21 (8) ◽  
pp. 2605
Author(s):  
Ashley Novais ◽  
Carlos Calaza ◽  
José Fernandes ◽  
Helder Fonseca ◽  
Patricia Monteiro ◽  
...  

Multisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer neural probes combine rigid silicon and flexible polymer parts into one single device and allow, for example, the precise integration of complex probe geometries, such as multishank designs, with flexible biocompatible cabling. Despite these advantages and benefiting from highly reproducible fabrication methods on both silicon and polymer substrates, they have not been widely available. This paper presents the development, fabrication, characterization, and in vivo electrophysiological assessment of a hybrid multisite multishank silicon probe with a monolithically integrated polyimide flexible interconnect cable. The fabrication process was optimized at wafer level, and several neural probes with 64 gold electrode sites equally distributed along 8 shanks with an integrated 8 µm thick highly flexible polyimide interconnect cable were produced. The monolithic integration of the polyimide cable in the same fabrication process removed the necessity of the postfabrication bonding of the cable to the probe. This is the highest electrode site density and thinnest flexible cable ever reported for a hybrid silicon/polymer probe. Additionally, to avoid the time-consuming bonding of the probe to definitive packaging, the flexible cable was designed to terminate in a connector pad that can mate with commercial zero-insertion force (ZIF) connectors for electronics interfacing. This allows great experimental flexibility because interchangeable packaging can be used according to experimental demands. High-density distributed in vivo electrophysiological recordings were obtained from the hybrid neural probes with low intrinsic noise and high signal-to-noise ratio (SNR).


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