A transport model describing how defect accumulation leads to intrinsic dielectric breakdown and post-breakdown conduction
Keyword(s):
A Charge Transport Model for SiCOH Dielectric Breakdown in Copper Interconnects and Its Applications
2014 ◽
Vol 14
(1)
◽
pp. 133-138
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Keyword(s):
1974 ◽
Vol 32
◽
pp. 544-545
2019 ◽
Vol 139
(11)
◽
pp. 1248-1253
Keyword(s):
2014 ◽
Vol 134
(4)
◽
pp. 237-242