A transport model describing how defect accumulation leads to intrinsic dielectric breakdown and post-breakdown conduction

2022 ◽  
Vol 128 ◽  
pp. 114459
Author(s):  
Yueming Xu ◽  
Toh-Ming Lu ◽  
Joel L. Plawsky
2018 ◽  
Vol 91 ◽  
pp. 232-242
Author(s):  
Sean P. Ogden ◽  
Yueming Xu ◽  
Kong Boon Yeap ◽  
Tian Shen ◽  
Toh-Ming Lu ◽  
...  

Author(s):  
L.H. Bolz ◽  
D.H. Reneker

The attack, on the surface of a polymer, by the atomic, molecular and ionic species that are created in a low pressure electrical discharge in a gas is interesting because: 1) significant interior morphological features may be revealed, 2) dielectric breakdown of polymeric insulation on high voltage power distribution lines involves the attack on the polymer of such species created in a corona discharge, 3) adhesive bonds formed between polymer surfaces subjected to such SDecies are much stronger than bonds between untreated surfaces, 4) the chemical modification of the surface creates a reactive surface to which a thin layer of another polymer may be bonded by glow discharge polymerization.


2014 ◽  
Vol 134 (4) ◽  
pp. 237-242
Author(s):  
Naru Matsugasaki ◽  
Katsuyoshi Shinyama ◽  
Shigetaka Fujita

Author(s):  
Horatio Rodrigo ◽  
Wolfgang Baumgartinger ◽  
Aniket Ingrole ◽  
Z (Richard) Liang ◽  
Danny George. Crook ◽  
...  

2003 ◽  
Vol 766 ◽  
Author(s):  
Ahila Krishnamoorthy ◽  
N.Y. Huang ◽  
Shu-Yunn Chong

AbstractBlack DiamondTM. (BD) is one of the primary candidates for use in copper-low k integration. Although BD is SiO2 based, it is vastly different from oxide in terms of dielectric strength and reliability. One of the main reliability concerns is the drift of copper ions under electric field to the surrounding dielectric layer and this is evaluated by voltage ramp (V-ramp) and time dependent dielectric breakdown (TDDB). Metal 1 and Metal 2 intralevel comb structures with different metal widths and spaces were chosen for dielectric breakdown studies. Breakdown field of individual test structures were obtained from V-ramp tests in the temperature range of 30 to 150°C. TDDB was performed in the field range 0.5 – 2 MV/cm. From the leakage between combs at the same level (either metal 1 or metal 2) Cu drift through SiC/BD or SiN/BD interface was characterized. It was found that Cu/barrier and barrier/low k interfaces functioned as easy paths for copper drift thereby shorting the lines. Cu/SiC was found to provide a better interface than Cu/SiN.


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