Effect of crystal orientation on inner surface roughness of micro metal tubes in hollow sinking

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ABSTRACTUltrathin films of perovskite PbTiO3, 10–100nm thick, were epitaxially grown on miscut (001)SrTiO3 substrate by rf-magnetron sputtering at 600°C. The electron microscope and high resolution x-ray diffraction analysis suggested the evidence of epitaxial growth of (001)PbTiO3/(001)SrTiO3 with three dimensional crystal orientation. The stoichiometric film shows extremely smooth surface with the surface roughness less than 3nm. Deposition on a miscut substrate under stoichiometric conditions is essential to make continuous thin films of single crystal perovskite PbTiO3.


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