Tester for space micro-accelerometer

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.

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An automated CAE system for multidisciplinary structural design: its application to micro accelerometer

Journal of Mechanical Science and Technology ◽

10.1007/s12206-010-0603-1 ◽

2010 ◽

Vol 24 (9) ◽

pp. 1875-1883 ◽

Cited By ~ 1

Author(s):

Joon-Seong Lee ◽

Ho-Jung Lee

Keyword(s):

Structural Design ◽

Cae System ◽

Micro Accelerometer

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A low noise and low temperature coefficient CMOS bandgap reference for MEMS micro-accelerometer

2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser TechnologyOptoelectronics Technology (ASOT) ◽

10.1109/rcslplt.2010.5615304 ◽

2010 ◽

Author(s):

Lv Bingjun ◽

Liu Xiaowei ◽

Wang Pengfei ◽

Yin Liang ◽

Xu Na

Keyword(s):

Low Temperature ◽

Temperature Coefficient ◽

Low Noise ◽

Bandgap Reference ◽

Micro Accelerometer

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The Design of AlGaN/GaN HEFT-Micro-Accelerometer and Temperature- Dependence Electrical Performance

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.483.174 ◽

2011 ◽

Vol 483 ◽

pp. 174-179 ◽

Cited By ~ 1

Author(s):

Ting Liang ◽

Jian Jun Tang ◽

Qian Qian Zhang ◽

Yong Wang ◽

Jing Li ◽

...

Keyword(s):

Temperature Dependence ◽

Electrical Performance ◽

Saturation Current ◽

Temperature Range ◽

Different Temperatures ◽

Piezoresistance Coefficient ◽

Micro Accelerometer

In this paper, We use a novel principle to detect acceleration and report how I-V characteristics and piezoresistance coefficient of AlGaN/GaN HEFT-micro-accelerometer are affected by setting different temperatures. It is shown that saturation current of device would go down if the temperature goes up, which is about 0.028mA/°C, based on the research. However, the device can work well at the temperature range of -50°C to 50°C, which indicates that it can work safely in the larger temperature range.

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A New Design of a Piezoelectric Triaxial Micro-Accelerometer

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.645-646.841 ◽

2015 ◽

Vol 645-646 ◽

pp. 841-846 ◽

Cited By ~ 1

Author(s):

Jian Yan Wang ◽

Ting Ting Wang ◽

Hang Guo

Keyword(s):

Simulation Analysis ◽

Structural Parameters ◽

Sol Gel ◽

Triaxial Accelerometer ◽

Response Frequency ◽

Pzt Films ◽

New Type ◽

The Cross ◽

Cross Axis ◽

Micro Accelerometer

Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “x” type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz.

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