Gate Dielectric Integrity along the Road Map of CMOS Scaling including Multi-Gate Fet, TiN Metal Gate, and HfSiON High-k Gate Dielectric

2006 ◽  
Author(s):  
T. Pompl ◽  
H. Mogul ◽  
M. Kerber ◽  
G. Haase ◽  
E. Ogawa ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Metal Gate ◽  
The Road ◽  
Cmos Scaling ◽  
Road Map ◽  
High K ◽  
Tin Metal ◽  
High K Gate Dielectric

Oxygen Transfer from Metal Gate to High-k Gate Dielectric Stack: Interface Structure & Property Changes

2019 ◽  
Vol 11 (4) ◽  
pp. 213-218 ◽  
Author(s):  
Jeong-Hee Ha ◽  
Husam AlShareef ◽  
Jim Chambers ◽  
Yun Sun ◽  
Piero Pianetta ◽  
...  
Keyword(s):  
Oxygen Transfer ◽  
Gate Dielectric ◽  
Interface Structure ◽  
Structure Property ◽  
Metal Gate ◽  
High K ◽  
Property Changes ◽  
High K Gate Dielectric

Analysis of GOI-MOSFET with high-k gate dielectric and metal gate fabricated by Ge condensation technique

2006 ◽  
Vol 38 (12-13) ◽  
pp. 1720-1724 ◽  
Author(s):  
Mungi Park ◽  
Jicheol Bea ◽  
Takafumi Fukushima ◽  
Mitsumasa Koyanagi
Keyword(s):  
Gate Dielectric ◽  
Metal Gate ◽  
High K ◽  
High K Gate Dielectric

Integration of HfxTayN Metal Gate Electrode with High-k Gate Dielectric in MOS Devices

2019 ◽  
Vol 2 (1) ◽  
pp. 41-48
Author(s):  
Rosa María Luna-Sánchez ◽  
Ignacio González-Martínez
Keyword(s):  
Gate Dielectric ◽  
Gate Electrode ◽  
Metal Gate ◽  
Mos Devices ◽  
High K ◽  
High K Gate Dielectric
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