Release etching and characterization of MEMS capacitive pressure sensors integrated on a standard 8-metal 130 nm CMOS process

This paper presents a second-order discrete-time Sigma-Delta (SD) Analog-to-Digital Converter (ADC) with over 80 dB Signal to Noise Ratio (SNR), which is applied in a signal conditioning IC for automotive piezo-resistive pressure sensors. To reduce the flicker noise of the structure, choppers are used in every stage of the high gain amplifiers. Besides, to reduce the required area and power, only the CIC filter structure is adopted as a decimation filter. This filter has a configurable structure that can be applied to different data rates and input signal bandwidths. The proposed ADC was fabricated and measured in a 0.18-µm CMOS process. Due to the application of only a CIC filter, the total active area of the SD-ADC and reference generator is 0.49 mm2 where the area of the decimation filter is only 0.075 mm2. For the input signal bandwidth of 1.22 kHz, it achieved over 80 dB SNR in a 2.5 MHz sampling frequency while consuming 646 µW power.

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Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors

Microsystem Technologies ◽

10.1007/s00542-013-2064-9 ◽

2014 ◽

Vol 20 (4-5) ◽

pp. 861-867 ◽

Cited By ~ 5

Author(s):

T. Waber ◽

W. Pahl ◽

M. Schmidt ◽

G. Feiertag ◽

S. Stufler ◽

...

Keyword(s):

Flip Chip ◽

Pressure Sensors ◽

Barometric Pressure

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Modeling, fabrication, and characterization of SiC concentrically matched differential capacitance output pressure sensors

Sensors and Actuators A Physical ◽

10.1016/j.sna.2018.02.027 ◽

2018 ◽

Vol 273 ◽

pp. 293-302 ◽

Cited By ~ 5

Author(s):

Levent Beker ◽

Ayden Maralani ◽

Liwei Lin ◽

Albert P. Pisano

Keyword(s):

Pressure Sensors ◽

Differential Capacitance ◽

Output Pressure ◽

Fabrication And Characterization

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Simulations and Experimental Investigations on the Acoustic Characterization of Centrifugal Pumps of Different Specific Speed

International Journal of Turbomachinery Propulsion and Power ◽

10.3390/ijtpp4030016 ◽

2019 ◽

Vol 4 (3) ◽

pp. 16

Author(s):

Christian Lehr ◽

Andreas Linkamp ◽

Daniel Aurich ◽

Andreas Brümmer

Keyword(s):

Dynamic Pressure ◽

Pressure Sensors ◽

Dipole Source ◽

Experimental Investigations ◽

Acoustic Excitation ◽

Centrifugal Pumps ◽

Transmission Parameters ◽

Acoustic Characterization ◽

Specific Speed

Subject of discussion are simulations and experimental investigations on the acoustic characterization of three single stage centrifugal pumps of different specific speed. In operation, these pump-types generate pressure pulsation at blade passing frequency, primarily due to rotor-volute-interaction. In order to determine the acoustic excitation it is necessary to know about the pumps’ acoustic transmission parameters. In this paper, a one-dimensional numerical model for transient time-domain simulation is presented, which takes into account the pump geometry as well as the volutes’ structural behaviour by means of the local effective speed of sound. Numerical results for the transmission characteristics of the three different pumps are shown in terms of scattering matrices and evaluated against parameters calculated from measurement results. The experimental analyses are carried out using dynamic pressure sensors in both the suction and the discharge pipe. Assuming solely plane wave propagation, the complex acoustic field on each side is evaluated independently. The so called “two source” method is then used to determine the transmission parameters of the pumps in standstill for a range of frequencies experimentally. Subsequently, the acoustic excitation at varying rotational speed is evaluated by means of measurements at the pumps in operation and presented as monopole and dipole source types for cavitation-free conditions.

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