scholarly journals Observation and analysis of the quality factor variation behavior in a monolithic fused silica cylindrical resonator

2017 ◽  
Vol 260 ◽  
pp. 81-89 ◽  
Author(s):  
Yao Pan ◽  
Tianliang Qu ◽  
Dongya Wang ◽  
Suyong Wu ◽  
Jianping Liu ◽  
...  
Keyword(s):  
Quality Factor ◽  
Fused Silica ◽  
Cylindrical Resonator

scholarly journals A 5.86 Million Quality Factor Cylindrical Resonator with Improved Structural Design Based on Thermoelastic Dissipation Analysis

Sensors ◽  
2020 ◽  
Vol 20 (21) ◽  
pp. 6003
Author(s):  
Libin Zeng ◽  
Yiming Luo ◽  
Yao Pan ◽  
Yonglei Jia ◽  
Jianping Liu ◽  
...  
Keyword(s):  
Quality Factor ◽  
Structural Design ◽  
Fused Silica ◽  
Q Factor ◽  
The Finite Element Method ◽  
Cylindrical Resonator ◽  
Traditional Structure ◽  
Cylindrical Resonators ◽  
Quality Factor Q ◽  
Crucial Parameter

The cylindrical resonator is the core component of cylindrical resonator gyroscopes (CRGs). The quality factor (Q factor) of the resonator is one crucial parameter that determines the performance of the gyroscope. In this paper, the finite element method is used to theoretically investigate the influence of the thermoelastic dissipation (TED) of the cylindrical resonator. The improved structure of a fused silica cylindrical resonator is then demonstrated. Compared with the traditional structure, the thermoelastic Q (QTED) of the resonator is increased by 122%. In addition, the Q factor of the improved cylindrical resonator is measured, and results illustrate that, after annealing and chemical etching, the Q factor of the resonator is significantly higher than that of the cylindrical resonators reported previously. The Q factor of the cylindrical resonator in this paper reaches 5.86 million, which is the highest value for a cylindrical resonator to date.

Effect of Imperfections on Fused Silica Shell Resonators

2014 ◽  
Author(s):  
Ali Darvishian ◽  
Behrouz Shiari ◽  
Jae Yoong Cho ◽  
Khalil Najafi
Keyword(s):  
Quality Factor ◽  
High Performance ◽  
Silica Shell ◽  
Fused Silica ◽  
High Quality Factor ◽  
High Quality ◽  
Geometric Imperfection ◽  
Mass Imbalance ◽  
Resonance Frequencies ◽  
Frequency Split

Axisymmetric shell resonators have been attractive candidates for high performance MEMS vibratory gyroscopes because of their high quality factor, low sensitivity to environmental vibrations and electrostatic tuning capability. Fused silica shell resonators made by blow torch molding with high quality factor could perform as high performance MEMS gyroscopes. Despite such advantageous features, the performance of these shell resonators is limited by geometric imperfections that occur during fabrication. This paper investigates effect of geometric asymmetries such as height and radius imperfections, notch, and mass imbalance in the rim of gyroscopes on the split in natural frequencies of the n=2 wineglass modes. Numerical simulation shows that perfect fused silica shell has 13929 Hz natural resonance frequencies without any frequency split. Analysis of imperfect shell reveals that frequency split is very sensitive to edge geometric imperfection and mass imbalance in the rim. On the other hand, Δf is not very sensitive to the notch in the rim of shell and height imperfection less than 40μm.

scholarly journals Trimming of Imperfect Cylindrical Fused Silica Resonators by Chemical Etching

Sensors ◽  
2019 ◽  
Vol 19 (16) ◽  
pp. 3596 ◽  
Author(s):  
Yunfeng Tao ◽  
Yao Pan ◽  
Shilong Jin ◽  
Yonglei Jia ◽  
Kaiyong Yang ◽  
...  
Keyword(s):  
Experimental Data ◽  
Solid State ◽  
Theoretical Calculation ◽  
Material Properties ◽  
Chemical Etching ◽  
Fused Silica ◽  
Cylindrical Resonator ◽  
Frequency Split ◽  
Frequency Trimming ◽  
Stiffness Distribution

The cylindrical resonator gyroscope (CRG) is a kind of solid-state gyroscope with a wide application market. The cylindrical resonator is the key component of CRG, whose quality factor and symmetry will directly affect the performance of the gyroscope. Due to the material properties and fabrication limitations, the actual resonator always has some defects. Therefore, frequency trimming, i.e., altering the local mass or stiffness distribution by certain methods, is needed to improve the overall symmetry of the resonator. In this paper, we made further derivation based on the chemical trimming theory proposed by Basarab et al. We built up the relation between the frequency split and the balanced mass to determine the mass to be removed. Chemical trimming experiments were conducted on three cylindrical fused silica resonators. The frequency splits of the three resonators were around 0.05 Hz after chemical trimming. The relation between frequency split and balanced mass established from experimental data was consistent with the theoretical calculation. Therefore, frequency split can be reduced to lower than 0.05 Hz under rigorous theoretical calculation and optimized chemical trimming parameters.

scholarly journals Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Sensors ◽  
2020 ◽  
Vol 20 (4) ◽  
pp. 1032
Author(s):  
Pengbo Xiao ◽  
Zhinan Qiu ◽  
Yiming Luo ◽  
Yao Pan ◽  
Tianliang Qu ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Temperature Variation ◽  
Fused Silica ◽  
Q Factor ◽  
Temperature Drift ◽  
Cylindrical Resonator ◽  
Influence Of Temperature ◽  
Vibratory Gyroscopes ◽  
Frequency Mismatch ◽  
Vibrational Characteristics

The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

scholarly journals Very high quality factor measured in annealed fused silica

2004 ◽  
Vol 21 (16) ◽  
pp. 3887-3892 ◽  
Author(s):  
Alexandr Ageev ◽  
Belkis Cabrera Palmer ◽  
Antonio De Felice ◽  
Steven D Penn ◽  
Peter R Saulson
Keyword(s):  
Quality Factor ◽  
Fused Silica ◽  
High Quality Factor ◽  
High Quality ◽  
Very High

Thermoelastic Damping Based Design, Sensitivity Study and Demonstration of a Functional Hybrid Gyroscope Resonator for High Quality Factor

2021 ◽  
Vol 29 (1) ◽  
pp. 70-96
Author(s):  
N.G. Sharma ◽  
◽  
Sundararajan T. ◽  
G.S. Singh ◽  
◽  
...  
Keyword(s):  
Thin Film ◽  
Quality Factor ◽  
Sensitivity Study ◽  
Fused Silica ◽  
High Quality Factor ◽  
Q Factor ◽  
Thermoelastic Damping ◽  
High Quality ◽  
Field Problem ◽  
Macro Scale

The most critical element of Hemispherical Resonator Gyroscope (HRG) is the high quality factor (Q-factor) mechanical resonator. This paper discusses the role of thermoelastic damping (TED) on effective Q-factor. Finite element method (FEM) is used to solve this highly coupled field problem involving vibration, solid mechanics, heat transfer and thermodynamics. The major contribution of this paper is the sensitivity analysis of the effect of material property, operating temperature and dimensions to arrive at macro scale resonator configuration. Hybrid hemispherical-cylindrical configuration is proposed by studying the performance parameters such as effective mass and angular gain.The uniqueness of the present work is the sensitivity study of ultra thin film coating (volume fraction of 0.01%), coating variations and different coating configurations. The coating can reduce the Q-factor by a few orders compared to uncoated shell. It has been found that coating material selection and coating configuration are very important factors. Another significance of the present work is the realization and detailed characterization of the hybrid fused silica resonator. Thin film gold coating is done on the 3D surfaces of the realized precision resonator. Detailed coating characterization is carried out using sophisticated instruments. Very fine balancing to the order of a few mHz is achieved after coating. Q-factor measurement of the coated resonator is carried out using LDV and achieved a few millions in the final functional hybrid resonator.

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