Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol–gel derived nanocrystalline zinc oxide film

2010 ◽  
Vol 148 (2) ◽  
pp. 347-352 ◽  
Author(s):  
Hoang-Si Hong ◽  
Gwiy-Sang Chung
2013 ◽  
Vol 667 ◽  
pp. 553-557 ◽  
Author(s):  
M. Awalludin ◽  
Mohamad Hafiz Mamat ◽  
Mohd Zainizan Sahdan ◽  
Z. Mohamad ◽  
Mohamad Rusop

This paper focus on nanostructured Zinc Oxide (ZnO) thin film based humidity sensor prepared using sol-gel method immersion technique at different immersion time. Scanning Electron Microscopy (SEM) investigations reveal nanorods ZnO were deposited on glass substrate with nanorods length increased with immersion time. All fabricated sensors show current intensity increment response when relative humidity is increased. Sensor fabricated at 16 hr immersion time shows the highest sensitivity in this study.


2000 ◽  
Vol 39 (Part 2, No. 7B) ◽  
pp. L713-L715 ◽  
Author(s):  
Toshimi Nagase ◽  
Toshihiko Ooie ◽  
Yoji Makita ◽  
Masahiro Nakatsuka ◽  
Kazuo Shinozaki ◽  
...  

Author(s):  
В.А. Смирнов ◽  
Р.В. Томинов ◽  
В.И. Авилов ◽  
Н.И. Алябьева ◽  
З.Е. Вакулов ◽  
...  

AbstractThe results of experimental investigations into the memristor effect and influence of annealing modes on the electrical properties of nanocrystalline zinc-oxide films fabricated by pulsed laser deposition are presented. The possibility of fabricating a nanocrystalline zinc-oxide film by pulsed laser deposition in a broad range of electrical (resistivity from 1.44 × 10^–5 to 8.06 × 10^–1 Ω cm) and morphological (roughness from 0.43 ± 0.32 to 6.36 ± 0.38 nm) parameters due to the use of post-growth annealing in oxygen (pressure 10^–1 and 10^–3 Torr, temperature 300 and 800°C, and duration from 1 to 10 h) is presented. It is shown that a nanocrystalline zinc-oxide film 58 ± 2 nm in thickness manifests a stable memristor effect slightly dependent on its morphology—applying a voltage of –2.5 and +4 V leads to switching between states with the resistance 3.3 ± 1.1 × 10^9 and 8.1 ± 3.4 × 10^7 Ω, respectively. These results can be used when developing designs and production processes of resistive random-access memory (RRAM) units based on the memristor effect as well as optoelectronics, microelectronics, and nanoelectronics and nanosystem devices.


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