Nucleation and growth of DC magnetron sputtered titanium diboride thin films

In the last decade and a half, thin film research, particularly research into problems associated with epitaxy, has developed from a simple empirical process of determining the conditions for epitaxy into a complex analytical and experimental study of the nucleation and growth process on the one hand and a technology of very great importance on the other. During this period the thin films group of the University of Chile has studied the epitaxy of metals on metal and insulating substrates. The development of the group, one of the first research groups in physics to be established in the country, has parallelled the increasing complexity of the field.The elaborate techniques and equipment now needed for research into thin films may be illustrated by considering the plant and facilities of this group as characteristic of a good system for the controlled deposition and study of thin films.

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Investigation of ultra-thin films of YBa2Cu3O7−δ grown on MgO

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100173169 ◽

1990 ◽

Vol 48 (4) ◽

pp. 6-7

Author(s):

S.K. Streiffer ◽

C.B. Eom ◽

J.C. Bravman ◽

T.H. Geballet

Keyword(s):

Thin Films ◽

Room Temperature ◽

Deposition Process ◽

Nucleation And Growth ◽

Multilayer Structures ◽

Rf Power ◽

Oxygen Loss ◽

Transmission Electron ◽

Single Target ◽

Mtorr Argon

The study of very thin (<15 nm) YBa2Cu3O7−δ (YBCO) films is necessary both for investigating the nucleation and growth of films of this material and for achieving a better understanding of multilayer structures incorporating such thin YBCO regions. We have used transmission electron microscopy to examine ultra-thin films grown on MgO substrates by single-target, off-axis magnetron sputtering; details of the deposition process have been reported elsewhere. Briefly, polished MgO substrates were attached to a block placed at 90° to the sputtering target and heated to 650 °C. The sputtering was performed in 10 mtorr oxygen and 40 mtorr argon with an rf power of 125 watts. After deposition, the chamber was vented to 500 torr oxygen and allowed to cool to room temperature. Because of YBCO’s susceptibility to environmental degradation and oxygen loss, the technique of Xi, et al. was followed and a protective overlayer of amorphous YBCO was deposited on the just-grown films.

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Interface motion during recrystallization of amorphous NiSi2

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100175752 ◽

1990 ◽

Vol 48 (4) ◽

pp. 524-525

Author(s):

J. L. Batstone ◽

D.A. Smith

Keyword(s):

Thin Films ◽

Room Temperature ◽

Amorphous Film ◽

Nucleation And Growth ◽

Recrystallization Process ◽

Amorphous Films ◽

Interface Motion ◽

Si Substrates ◽

Spherical Caps ◽

Crystal Interfaces

Recrystallization of amorphous NiSi2 involves nucleation and growth processes which can be studied dynamically in the electron microscope. Previous studies have shown thatCoSi2 recrystallises by nucleating spherical caps which then grow with a constant radial velocity. Coalescence results in the formation of hyperbolic grain boundaries. Nucleation of the isostructural NiSi2 results in small, approximately round grains with very rough amorphous/crystal interfaces. In this paper we show that the morphology of the rccrystallizcd film is dramatically affected by variations in the stoichiometry of the amorphous film.Thin films of NiSi2 were prepared by c-bcam deposition of Ni and Si onto Si3N4, windows supported by Si substrates at room temperature. The base pressure prior to deposition was 6 × 107 torr. In order to investigate the effect of stoichiomctry on the recrystallization process, the Ni/Si ratio was varied in the range NiSi1.8-2.4. The composition of the amorphous films was determined by Rutherford Backscattering.

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Orientation transitions during the growth of imine covalent organic framework thin films

Journal of Materials Chemistry C ◽

10.1039/c7tc01324h ◽

2017 ◽

Vol 5 (21) ◽

pp. 5090-5095 ◽

Cited By ~ 16

Author(s):

H. Wang ◽

B. He ◽

F. Liu ◽

C. Stevens ◽

M. A. Brady ◽

...

Keyword(s):

Thin Film ◽

Thin Films ◽

Experimental Observation ◽

Growth Kinetic ◽

Film Growth ◽

Nucleation And Growth ◽

Thin Film Growth ◽

Covalent Organic Framework ◽

Kinetic Processes ◽

Organic Framework

The first experimental observation of a rare re-entrant transition during COF thin film growth reveals independent nucleation and growth kinetic processes.

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Controlling nucleation, growth, and orientation of metal halide perovskite thin films with rationally selected additives

Journal of Materials Chemistry A ◽

10.1039/c6ta07671h ◽

2017 ◽

Vol 5 (1) ◽

pp. 113-123 ◽

Cited By ~ 64

Author(s):

Benjamin J. Foley ◽

Justin Girard ◽

Blaire A. Sorenson ◽

Alexander Z. Chen ◽

J. Scott Niezgoda ◽

...

Keyword(s):

Thin Films ◽

Nucleation And Growth ◽

Metal Halide ◽

Hybrid Perovskite ◽

Metal Halide Perovskite ◽

Halide Perovskite ◽

Nucleation Growth

Impact of rationally selected additives in precursor solutions on the nucleation and growth of hybrid perovskite thin films is investigated.

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Nucleation and growth of thin films: recent progress

Vacuum ◽

10.1016/0042-207x(83)90595-x ◽

1983 ◽

Vol 33 (10-12) ◽

pp. 701-705 ◽

Cited By ~ 31

Author(s):

J.A. Venables

Keyword(s):

Thin Films ◽

Recent Progress ◽

Nucleation And Growth

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Formation and Structure of Thin Mo Layers and Mo-Ni Multilayers on Ni(001) by Molecular Beam Epitaxy

MRS Proceedings ◽

10.1557/proc-160-215 ◽

1989 ◽

Vol 160 ◽

Author(s):

Y.H. Lee ◽

R.P. Burns ◽

J.B. Posthill ◽

K.J. Bachmann

Keyword(s):

Thin Films ◽

High Temperature ◽

High Resolution ◽

Molecular Beam Epitaxy ◽

Low Temperature ◽

Molecular Beam ◽

Nucleation And Growth ◽

Multilayer Heterostructures ◽

Annealing Experiments ◽

Small Period

AbstractThe growth of Mo overtayers and Mo-Ni multilayers on single crystal Ni(001) substrates is described. The nucleation and growth processes of these thin films were analyzed by LEED, XPS, AES and SEM and High Resolution AES investigations without breaking vacuum. Growth of Mo-Ni multilayer heterostructures on Ni(001) with ≈20Å periodicity is possible at low temperature (≈200 °C). At high temperature (≈550 °C) the growth proceeds by the Volmer-Weber mechanism preventing the deposition of small period multilayers. Annealing experiments on ultra-thin (<20Å) Mo overiayers deposited at 200 °C show an onset of interdiffusion at ≈ 550°C coupled to the generation of a new surface periodicity.

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