scholarly journals Barrier property of TiSiN films formed by low frequency, high density inductively coupled plasma process

2005 ◽  
Vol 198 (1-3) ◽  
pp. 291-295 ◽  
Author(s):  
Y.C. Ee ◽  
Z. Chen ◽  
W.D. Wang ◽  
D.Z. Chi ◽  
S. Xu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Frequency ◽  
High Density ◽  
Barrier Property ◽  
Plasma Process ◽  
Inductively Coupled

scholarly journals Low-frequency, high-density, inductively coupled plasma sources: Operation and applications

2001 ◽  
Vol 8 (5) ◽  
pp. 2549-2557 ◽  
Author(s):  
S. Xu ◽  
K. N. Ostrikov ◽  
Y. Li ◽  
E. L. Tsakadze ◽  
I. R. Jones
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Frequency ◽  
High Density ◽  
Plasma Sources ◽  
Inductively Coupled

Plasma-Assisted Nitriding in Low-Frequency Inductively Coupled Plasma Enhanced with Ferromagnetic Cores

2018 ◽  
Vol 37 (6) ◽  
pp. 545-550
Author(s):  
Mikhail Isupov ◽  
Vadim Pinaev ◽  
Daria Mul ◽  
Natalia Belousova
Keyword(s):  
Inductively Coupled Plasma ◽  
High Speed ◽  
Low Frequency ◽  
Sample Surface ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Steel Aisi ◽  
Current Densities ◽  
Aisi 321 ◽  
Stainless Steel Aisi

AbstractAn experimental investigation of plasma-assisted nitriding of austenitic stainless steel AISI 321 in a low-pressure (7 Pa), low-frequency (50–100 kHz) nitrogen inductively coupled plasma enhanced with ferromagnetic cores has been performed at the temperatures of 470–625 °C, sample biases of ‒500–‒750 V, current densities on the sample surface of 1.2–3.3 mA/cm2 and nitriding times of 20 and 60 min. It is found that even the short (20 min) ion-plasma treatment results in the formation of nitrided layers with the thickness of up to 40 μm and microhardness of up to 9 GPa.The high speed of nitriding can be explained as a result of the joint action of high ion flux density and high ion energy on the sample surface.

Sign in / Sign up

Export Citation Format

Share Document