Adhesion of plasma-deposited silicon oxide barrier layers on PDMS containing polypropylene

2018 ◽  
Vol 335 ◽  
pp. 25-31 ◽  
Author(s):  
C. Hoppe ◽  
F. Mitschker ◽  
P. Awakowicz ◽  
D. Kirchheim ◽  
R. Dahlmann ◽  
...  
2019 ◽  
Vol 40 (2) ◽  
pp. 607-623
Author(s):  
Shaham Shafaei ◽  
Lanti Yang ◽  
Marcel Rudolph ◽  
Peter Awakowicz

2013 ◽  
Vol 1 (41) ◽  
pp. 12998 ◽  
Author(s):  
Tsung-Ming Yeh ◽  
Zhe Wang ◽  
Devinder Mahajan ◽  
Benjamin S. Hsiao ◽  
Benjamin Chu

2007 ◽  
Vol 1034 ◽  
Author(s):  
Thottam Kalkur ◽  
Troung Troung

AbstractThe high frequency operation of BST capacitors necessitates the development of low series resistance electrodes. As an alternative to platinum, DC magnetron sputtered IrO2/Aluminum top electrode metallization for BST capacitors has been proposed. The capacitance voltage characteristics of BST capacitors did not change significantly due to the deposition of aluminum on iridium oxide. Post annealing in nitrogen environment shows that IrO2/Al metallization does not degrade annealing temperature up to 450 oC.


2014 ◽  
Vol 29 (23) ◽  
pp. 2891-2897
Author(s):  
Tim C. Holgate ◽  
Li Han ◽  
NingYu Wu ◽  
Ngo Van Nong ◽  
Nini Pryds

Abstract


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