Characteristics of BST Capacitors with Aluminum Electrode and Iridium Oxide Barrier Layers
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AbstractThe high frequency operation of BST capacitors necessitates the development of low series resistance electrodes. As an alternative to platinum, DC magnetron sputtered IrO2/Aluminum top electrode metallization for BST capacitors has been proposed. The capacitance voltage characteristics of BST capacitors did not change significantly due to the deposition of aluminum on iridium oxide. Post annealing in nitrogen environment shows that IrO2/Al metallization does not degrade annealing temperature up to 450 oC.
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