Influence of process parameters on the characteristics of indium zinc oxide thin films deposited by DC magnetron sputtering

2004 ◽  
Vol 467 (1-2) ◽  
pp. 117-120 ◽  
Author(s):  
Young Soo Song ◽  
Jung Koo Park ◽  
Tae Wan Kim ◽  
Chee Won Chung
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Process Parameters ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Influence Of Process Parameters ◽  
Indium Zinc Oxide

Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

2011 ◽  
Vol 519 (20) ◽  
pp. 6910-6915 ◽  
Author(s):  
Hyeongsik Park ◽  
Kyungsoo Jang ◽  
Krishna Kumar ◽  
Shihyun Ahn ◽  
Jaehyun Cho ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Mechanism Analysis ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films
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