Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.04.084 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6910-6915 ◽

Author(s):

Hyeongsik Park ◽

Kyungsoo Jang ◽

Krishna Kumar ◽

Shihyun Ahn ◽

Jaehyun Cho ◽

...

Keyword(s):

Magnetron Sputtering ◽

Mechanism Analysis ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abec25 ◽

2021 ◽

Vol 30 (4) ◽

pp. 045002

Author(s):

Mihai-Andrei Petrea ◽

Eugen Stamate

Keyword(s):

Spatial Distribution ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Plasma Parameters ◽

Aluminum Doped Zinc Oxide ◽

Electrostatic Probe

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Properties of double-layered Ga-doped Al-zinc-oxide/titanium-doped indium–tin-oxide thin films prepared by dc magnetron sputtering applied for Si-based thin film solar cells

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3651099 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06B104

Author(s):

Chao-Chun Wang ◽

Dong-Sing Wuu ◽

Yang-Shih Lin ◽

Shui-Yang Lien ◽

Yung-Chuan Huang ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Solar Cells ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

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Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

Applied Physics Express ◽

10.7567/apex.7.031401 ◽

2014 ◽

Vol 7 (3) ◽

pp. 031401 ◽

Author(s):

DooHyun Kim ◽

JinNyoung Jang ◽

SooBok Yoon ◽

MunPyo Hong

Keyword(s):

Magnetron Sputtering ◽

Indium Gallium Zinc Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Oxygen Ions ◽

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Effect of Enhanced Plasma Density on the Properties of Aluminium Doped Zinc Oxide Thin Films Produced by DC Magnetron Sputtering

Journal of Material Science and Technology ◽

10.1016/s1005-0302(11)60080-7 ◽

2011 ◽

Vol 27 (5) ◽

pp. 393-397 ◽

Author(s):

Jun Gong ◽

Xiaobo Zhang ◽

Zhiliang Pei ◽

Chao Sun ◽

Lishi Wen

Keyword(s):

Magnetron Sputtering ◽

Plasma Density ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Physical properties of transparent conducting indium doped zinc oxide thin films deposited by pulsed DC magnetron sputtering

Journal of Electroceramics ◽

10.1007/s10832-008-9530-2 ◽

2008 ◽

Vol 23 (2-4) ◽

pp. 536-541 ◽

Author(s):

Young Ran Park ◽

Donggeun Jung ◽

Ki-Chul Kim ◽

Su Jeong Suh ◽

Tae Seok Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Physical Properties ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Influence of process parameters on the characteristics of indium zinc oxide thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2004.03.023 ◽

2004 ◽

Vol 467 (1-2) ◽

pp. 117-120 ◽

Author(s):

Young Soo Song ◽

Jung Koo Park ◽

Tae Wan Kim ◽

Chee Won Chung

Keyword(s):

Magnetron Sputtering ◽

Process Parameters ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Influence Of Process Parameters ◽

Indium Zinc Oxide

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Characteristics of micro-quantity Sn addition to amorphous indium–zinc–oxide thin films deposited by using DC magnetron sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.67.1056 ◽

2015 ◽

Vol 67 (6) ◽

pp. 1056-1063 ◽

Author(s):

Doyeong Kim ◽

Minje Kim ◽

Pungkeun Song

Keyword(s):

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-006-9039-x ◽

2006 ◽

Vol 17 (12) ◽

pp. 973-977 ◽

Author(s):

Yeon-Keon Moon ◽

Se-Hyun Kim ◽

Jong-Wan Park

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Influence Of Substrate

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Substrate-dependent Internal Stress of Aluminum-doped Zinc-oxide Thin Films Deposited by DC Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.58.787 ◽

2011 ◽

Vol 58 (4) ◽

pp. 787-791 ◽

Author(s):

Taewon Kim

Keyword(s):

Magnetron Sputtering ◽

Internal Stress ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide

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