Characteristics of micro-quantity Sn addition to amorphous indium–zinc–oxide thin films deposited by using DC magnetron sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.67.1056 ◽

2015 ◽

Vol 67 (6) ◽

pp. 1056-1063 ◽

Author(s):

Doyeong Kim ◽

Minje Kim ◽

Pungkeun Song

Keyword(s):

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Influence of process parameters on the characteristics of indium zinc oxide thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2004.03.023 ◽

2004 ◽

Vol 467 (1-2) ◽

pp. 117-120 ◽

Author(s):

Young Soo Song ◽

Jung Koo Park ◽

Tae Wan Kim ◽

Chee Won Chung

Keyword(s):

Magnetron Sputtering ◽

Process Parameters ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Influence Of Process Parameters ◽

Indium Zinc Oxide

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Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abec25 ◽

2021 ◽

Vol 30 (4) ◽

pp. 045002

Author(s):

Mihai-Andrei Petrea ◽

Eugen Stamate

Keyword(s):

Spatial Distribution ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Plasma Parameters ◽

Aluminum Doped Zinc Oxide ◽

Electrostatic Probe

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Properties of double-layered Ga-doped Al-zinc-oxide/titanium-doped indium–tin-oxide thin films prepared by dc magnetron sputtering applied for Si-based thin film solar cells

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3651099 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06B104

Author(s):

Chao-Chun Wang ◽

Dong-Sing Wuu ◽

Yang-Shih Lin ◽

Shui-Yang Lien ◽

Yung-Chuan Huang ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Solar Cells ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

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Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.03.087 ◽

2008 ◽

Vol 516 (7) ◽

pp. 1374-1376 ◽

Author(s):

G. Gonçalves ◽

P. Barquinha ◽

L. Raniero ◽

R. Martins ◽

E. Fortunato

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.04.084 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6910-6915 ◽

Author(s):

Hyeongsik Park ◽

Kyungsoo Jang ◽

Krishna Kumar ◽

Shihyun Ahn ◽

Jaehyun Cho ◽

...

Keyword(s):

Magnetron Sputtering ◽

Mechanism Analysis ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Characteristics of Indium Zinc Oxide Thin Films Deposited by Radio Frequency Reactive Magnetron Sputtering for Solar Cells Application

Solid State Phenomena - Advances in Nanomaterials and Processing ◽

10.4028/3-908451-31-0.999 ◽

2007 ◽

pp. 999-1002

Author(s):

Han Na Cho ◽

Jang Woo Lee ◽

Su Ryun Min ◽

Chee Won Chung

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Characteristics of indium zinc oxide thin films prepared by direct current magnetron sputtering for flexible solar cells

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2010.02.016 ◽

2011 ◽

Vol 95 (1) ◽

pp. 264-269 ◽

Author(s):

Yu Bin Xiao ◽

Seon Mi Kong ◽

Eun Ho Kim ◽

Chee Won Chung

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Direct Current ◽

Oxide Thin Films ◽

Indium Zinc Oxide ◽

Direct Current Magnetron Sputtering

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Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

Applied Physics Express ◽

10.7567/apex.7.031401 ◽

2014 ◽

Vol 7 (3) ◽

pp. 031401 ◽

Author(s):

DooHyun Kim ◽

JinNyoung Jang ◽

SooBok Yoon ◽

MunPyo Hong

Keyword(s):

Magnetron Sputtering ◽

Indium Gallium Zinc Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Oxygen Ions ◽

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Effect of Enhanced Plasma Density on the Properties of Aluminium Doped Zinc Oxide Thin Films Produced by DC Magnetron Sputtering

Journal of Material Science and Technology ◽

10.1016/s1005-0302(11)60080-7 ◽

2011 ◽

Vol 27 (5) ◽

pp. 393-397 ◽

Author(s):

Jun Gong ◽

Xiaobo Zhang ◽

Zhiliang Pei ◽

Chao Sun ◽

Lishi Wen

Keyword(s):

Magnetron Sputtering ◽

Plasma Density ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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