Low friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

2010 ◽  
Vol 518 (19) ◽  
pp. 5553-5557 ◽  
Author(s):  
J. Paulitsch ◽  
M. Schenkel ◽  
A. Schintlmeister ◽  
H. Hutter ◽  
P.H. Mayrhofer
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Multilayer Coatings ◽  
Deposition Technique ◽  
Dc Magnetron Sputtering ◽  
Low Friction ◽  
Sputtering Deposition

Characterization of silicon oxynitride films deposited by a high-power impulse magnetron sputtering deposition technique

2020 ◽  
Vol 59 (5) ◽  
pp. A176
Author(s):  
Bo-Huei Liao ◽  
Chien-Nan Hsiao ◽  
Ming-Hua Shiao ◽  
Sheng-Hui Chen
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Silicon Oxynitride ◽  
Deposition Technique ◽  
Sputtering Deposition

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

2021 ◽  
pp. 138792
Author(s):  
K. Bobzin ◽  
T. Brögelmann ◽  
N.C. Kruppe ◽  
M. Engels ◽  
C. Schulze
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Substrate Bias ◽  
Sputtering Deposition ◽  
Pulsed Magnetron

scholarly journals CuO films deposited by superimposed high power impulse and DC magnetron sputtering

2019 ◽  
Vol 1393 ◽  
pp. 012127
Author(s):  
V A Semenov ◽  
A S Grenadyorov ◽  
V O Oskirko ◽  
A N Zakharov ◽  
S V Rabotkin ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Dc Magnetron Sputtering
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