Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition

2011 ◽  
Vol 20 (1) ◽  
pp. 015008 ◽  
Author(s):  
S Tinck ◽  
A Bogaerts
Keyword(s):  
Atomic Layer Deposition ◽  
Computer Simulations ◽  
Inductively Coupled Plasma ◽  
Atomic Layer ◽  
Inductively Coupled ◽  
Layer Deposition

scholarly journals Inductively coupled plasma nanoetching of atomic layer deposition alumina

2018 ◽  
Vol 193 ◽  
pp. 28-33 ◽  
Author(s):  
Anpan Han ◽  
Bingdong Chang ◽  
Matteo Todeschini ◽  
Hoa Thanh Le ◽  
William Tiddi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Inductively Coupled Plasma ◽  
Atomic Layer ◽  
Inductively Coupled ◽  
Layer Deposition

Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dye Sensitized ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document