Area-Selective Atomic Layer Deposition Using an Inductively Coupled Plasma Polymerized Fluorocarbon Layer: A Case Study for Metal Oxides

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.6b09406 ◽

2016 ◽

Vol 120 (46) ◽

pp. 26393-26401 ◽

Author(s):

Ali Haider ◽

Petro Deminskyi ◽

Talha M. Khan ◽

Hamit Eren ◽

Necmi Biyikli

Keyword(s):

Atomic Layer Deposition ◽

Metal Oxides ◽

Inductively Coupled Plasma ◽

Atomic Layer ◽

Inductively Coupled ◽

Layer Deposition

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Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3

Journal of Applied Physics ◽

10.1063/1.2924406 ◽

2008 ◽

Vol 103 (10) ◽

pp. 103302 ◽

Author(s):

S. B. S. Heil ◽

J. L. van Hemmen ◽

M. C. M. van de Sanden ◽

W. M. M. Kessels

Keyword(s):

Atomic Layer Deposition ◽

Metal Oxides ◽

Reaction Mechanisms ◽

Atomic Layer ◽

Layer Deposition

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Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/1/015008 ◽

2011 ◽

Vol 20 (1) ◽

pp. 015008 ◽

Author(s):

S Tinck ◽

A Bogaerts

Keyword(s):

Atomic Layer Deposition ◽

Computer Simulations ◽

Inductively Coupled Plasma ◽

Atomic Layer ◽

Inductively Coupled ◽

Layer Deposition

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Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment

Journal of Applied Physics ◽

10.1063/1.4768839 ◽

2012 ◽

Vol 112 (12) ◽

pp. 124102 ◽

Author(s):

Hsin-Wei Huang ◽

Wen-Chih Chang ◽

Su-Jien Lin ◽

Yu-Lun Chueh

Keyword(s):

Atomic Layer Deposition ◽

Plasma Treatment ◽

Inductively Coupled Plasma ◽

Atomic Layer ◽

Deposition Technique ◽

Zno Film ◽

Inductively Coupled ◽

Layer Deposition ◽

Atomic Layer Deposition Technique

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Inductively coupled plasma etching of amorphous Al[sub 2]O[sub 3] and TiO[sub 2] mask layers grown by atomic layer deposition

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2353844 ◽

2006 ◽

Vol 24 (5) ◽

pp. 2350 ◽

Author(s):

J. Dekker ◽

K. Kolari ◽

R. L. Puurunen

Keyword(s):

Atomic Layer Deposition ◽

Plasma Etching ◽

Inductively Coupled Plasma ◽

Atomic Layer ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled ◽

Layer Deposition

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Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures

Thin Solid Films ◽

10.1016/j.tsf.2014.07.031 ◽

2014 ◽

Vol 566 ◽

pp. 93-98 ◽

Author(s):

Bo-Heng Liu ◽

Hung Ji Huang ◽

Sheng-Hsin Huang ◽

Chien-Nan Hsiao

Keyword(s):

Atomic Layer Deposition ◽

Chemical Stability ◽

Low Temperatures ◽

Inductively Coupled Plasma ◽

Atomic Layer ◽

Inductively Coupled ◽

Layer Deposition ◽

Thermal And Chemical Stability

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Inductively coupled plasma nanoetching of atomic layer deposition alumina

Microelectronic Engineering ◽

10.1016/j.mee.2018.02.023 ◽

2018 ◽

Vol 193 ◽

pp. 28-33 ◽

Author(s):

Anpan Han ◽

Bingdong Chang ◽

Matteo Todeschini ◽

Hoa Thanh Le ◽

William Tiddi ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Inductively Coupled Plasma ◽

Atomic Layer ◽

Inductively Coupled ◽

Layer Deposition

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Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/6.0000021 ◽

2020 ◽

Vol 38 (3) ◽

pp. 032408 ◽

Author(s):

Masaki Hirayama ◽

Akinobu Teramoto ◽

Shigetoshi Sugawa

Keyword(s):

Atomic Layer Deposition ◽

Inductively Coupled Plasma ◽

Plasma Reactor ◽

Atomic Layer ◽

Ion Flux ◽

Inductively Coupled ◽

Layer Deposition ◽

Inductively Coupled Plasma Reactor ◽

Interfacial Mixing

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The controlled deposition of metal oxides onto carbon nanotubes by atomic layer deposition: examples and a case study on the application of V2O4 coated nanotubes in gas sensing

Physical Chemistry Chemical Physics ◽

10.1039/b821555c ◽

2009 ◽

Vol 11 (19) ◽

pp. 3615 ◽

Author(s):

Marc-Georg Willinger ◽

Giovanni Neri ◽

Anna Bonavita ◽

Giuseppe Micali ◽

Erwan Rauwel ◽

...

Keyword(s):

Carbon Nanotubes ◽

Atomic Layer Deposition ◽

Metal Oxides ◽

Gas Sensing ◽

Atomic Layer ◽

Layer Deposition ◽

Controlled Deposition

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Interface Studies of Metal Oxides Grown Directly on Hybrid Perovskite by Atomic Layer Deposition

10.29363/nanoge.hopv.2019.166 ◽

2019 ◽

Author(s):

Claire Burgess ◽

Farzad Mardekatani Asl ◽

Valerio Zardetto ◽

Herbert Lifka ◽

Sjoerd Veenstra ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Metal Oxides ◽

Atomic Layer ◽

Hybrid Perovskite ◽

Layer Deposition

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ALD coating of centrifugally spun polymeric fibers and postannealing: case study for nanotubular TiO2 photocatalyst

Nanoscale Advances ◽

10.1039/d1na00288k ◽

2021 ◽

Author(s):

Martina Rihova ◽

Oksana Yurkevich ◽

Martin Motola ◽

Ludek Hromadko ◽

Zdeněk Spotz ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Vinyl Pyrrolidone ◽

Tio2 Photocatalyst ◽

Polymeric Fibers ◽

Layer Deposition ◽

Centrifugal Spinning ◽

Poly Vinyl Pyrrolidone

This work describes the synthesis of highly photocatalytically active TiO2 tubes (TiTBs) by combining centrifugal spinning and atomic layer deposition (ALD). Poly(vinyl pyrrolidone) (PVP) fibers were first produced by centrifugal...

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