SAW NOx gas sensor using WO3 thin-film sensitive coating

1997 ◽  
Vol 41 (1-3) ◽  
pp. 31-36 ◽  
Author(s):  
M. Penza ◽  
L. Vasanelli
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Sensitive Coating ◽  
Nox Gas Sensor

Ternary CuO:SnO2:ZnO (1:1:1) composite thin film for room temperature gas sensor application

Optik ◽  
2021 ◽  
Vol 234 ◽  
pp. 166615
Author(s):  
S.R. Cynthia ◽  
R. Sivakumar ◽  
C. Sanjeeviraja
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Room Temperature ◽  
Composite Thin Film ◽  
Sensor Application

Ozone and nitrogen dioxide gas sensor based on a nanostructured SrTi0.85Fe0.15O3 thin film

2015 ◽  
Vol 638 ◽  
pp. 374-379 ◽  
Author(s):  
Luís F. da Silva ◽  
Valmor R. Mastelaro ◽  
Ariadne C. Catto ◽  
Carlos A. Escanhoela ◽  
Sandrine Bernardini ◽  
...  
Keyword(s):  
Thin Film ◽  
Nitrogen Dioxide ◽  
Gas Sensor

NO2-sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film

2012 ◽  
Vol 161 (1) ◽  
pp. 447-452 ◽  
Author(s):  
Jing Zeng ◽  
Ming Hu ◽  
Weidan Wang ◽  
Huiqing Chen ◽  
Yuxiang Qin
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Sensing Properties

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Micro Gas Sensor ◽  
Thin Film Layer ◽  
Film Layer ◽  
The Difference ◽  
Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

Preparation and Characterization of SnO2/WO3/MWCNT Nanocomposite Thin Film for NO2 Gas Sensor

2010 ◽  
Vol 129-131 ◽  
pp. 99-103
Author(s):  
Wei Lin ◽  
Shi Zhen Huang ◽  
Wen Zhe Chen
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Photoelectron Spectroscopy ◽  
Mixed Oxides ◽  
Surface Composition ◽  
Chemical Elements ◽  
Film Material ◽  
Nanocomposite Thin Film ◽  
Oxide Compound ◽  
Thin Film Material

A novel nanocomposite thin film material of SnO2/WO3 metal oxide compound doped by multi-walled carbon nanotubes (MWCNT) and its corresponding gas sensor were prepared by radio frequency (RF) reactive magnetron sputtering. The surface composition and chemical elements of the thin film material were respectively analyzed and validated by X-ray diffraction (XRD) and photoelectron spectroscopy (XPS). The influencing factors of gas sensing properties were studied and the test results of gas sensor were analyzed. The results indicated that the detection using the composite material gas sensors for low concentration NO2 toxic gas could be greatly improved by MWCNTs which were doped on the mixed oxides matrix. A possible mechanism explaining the behaviour of the thin film gas sensor was introduced.

scholarly journals Enhanced Characteristics of Nondispersive Infrared CO2 Gas Sensor by Deposition of Hydrophobic Thin Film

Proceedings ◽  
2017 ◽  
Vol 1 (4) ◽  
pp. 410 ◽  
Author(s):  
Jinho Kim ◽  
Jayoung Lee ◽  
Keunheon Lee ◽  
Seunghwan Yi
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Co2 Gas ◽  
Co2 Gas Sensor

Thin film bulk acoustic wave resonator (TFBAR) gas sensor

2005 ◽  
Author(s):  
M. Benetti ◽  
D. Cannat ◽  
A. D'Amico ◽  
F. Di Pietrantonio ◽  
V. Foglietti ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Gas Sensor ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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