Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties

2000 ◽  
Vol 65 (1-3) ◽  
pp. 312-315 ◽  
Author(s):  
Wan-Young Chung ◽  
Go Sakai ◽  
Kengo Shimanoe ◽  
Norio Miura ◽  
Duk-Dong Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Gas Sensing ◽  
Oxide Thin Film ◽  
Silicon Substrates ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Indium Oxide Thin Film

Gas Sensing Properties of Indium Oxide Thin Film on Silicon Substrate Prepared by Spin-Coating Method

1998 ◽  
Vol 37 (Part 1, No. 9A) ◽  
pp. 4994-4998 ◽  
Author(s):  
Wan-Young Chung ◽  
Go Sakai ◽  
Kengo Shimanoe ◽  
Norio Miura ◽  
Duk-Dong Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Silicon Substrate ◽  
Spin Coating ◽  
Gas Sensing ◽  
Oxide Thin Film ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Coating Method ◽  
Indium Oxide Thin Film

Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

1998 ◽  
Vol 46 (2) ◽  
pp. 139-145 ◽  
Author(s):  
Wan-Young Chung ◽  
Go Sakai ◽  
Kengo Shimanoe ◽  
Norio Miura ◽  
Duk-Dong Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Spin Coating ◽  
Gas Sensing ◽  
Oxide Thin Film ◽  
Sensing Properties ◽  
Spin Coating Method ◽  
Gas Sensing Properties ◽  
Coating Method ◽  
Indium Oxide Thin Film

Evaluation of depletion layer width and gas-sensing properties of antimony-doped tin oxide thin film sensors

2015 ◽  
Vol 220 ◽  
pp. 1354-1360 ◽  
Author(s):  
Jianqiao Liu ◽  
Xuesong Liu ◽  
Zhaoxia Zhai ◽  
Guohua Jin ◽  
Qiuxuan Jiang ◽  
...  
Keyword(s):  
Thin Film ◽  
Tin Oxide ◽  
Gas Sensing ◽  
Depletion Layer ◽  
Oxide Thin Film ◽  
Layer Width ◽  
Sensing Properties ◽  
Depletion Layer Width ◽  
Thin Film Sensors ◽  
Gas Sensing Properties
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