EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures

2000 ◽  
Vol 63 (2) ◽  
pp. 177-184 ◽  
Author(s):  
Michael Stöger ◽  
Michael Nelhiebel ◽  
Peter Schattschneider ◽  
Viktor Schlosser ◽  
Alexander Breymesser ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Low Temperatures ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films

Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells

2007 ◽  
Vol 280-283 ◽  
pp. 1147-1148 ◽  
Author(s):  
Hai Feng Li ◽  
Yong Huang ◽  
Zhi Jian Wan ◽  
Hou Xing Zhang ◽  
Li Ming Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Solar Cells ◽  
Chemical Treatment ◽  
Polycrystalline Silicon ◽  
Crystal Size ◽  
Ultrasonic Method ◽  
Preferred Orientation ◽  
Silicon Thin Films ◽  
Columnar Grain

The thin-film of silicon deposited by RTCVD on pressureless sintered SiC substrate with the size of 30mm×20mm, which is cleaned by ultrasonic method and chemical treatment. The crystal size of silicon columnar grain can reach 190 µm and its preferred orientation is [111] after ZMR process.

Polycrystalline silicon thin films and solar cells prepared by rapid thermal CVD

1997 ◽  
Vol 48 (1-4) ◽  
pp. 321-326 ◽  
Author(s):  
Yuwen Zhao ◽  
Zhongming Li ◽  
Saoqi He ◽  
Xianbo Liao ◽  
Shuran Sheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Polycrystalline Silicon ◽  
Thermal Cvd ◽  
Silicon Thin Films

Redistribution of Ion Implanted Hydrogen in Polycrystalline Silicon Thin Films

1985 ◽  
Vol 59 ◽  
Author(s):  
Ronald N. Legge ◽  
James F. Brown
Keyword(s):  
Thin Films ◽  
Hall Mobility ◽  
Low Temperatures ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Spreading Resistance ◽  
Silicon Thin Films ◽  
Polycrystalline Silicon Films ◽  
Diffusion Of Hydrogen ◽  
Ion Implanted

ABSTRACTThe effect of implanted hydrogen on the resistivity of polycrystalline silicon films has been investigated. The observed reduction in resistivity due to hydrogen is most pronounced for lightly doped films, and is accentuated by a 450°C anneal. An increase in Hall mobility is also observed. The pre-implant resistivity is completely recovered by annealling at 600°C. Diffusion of hydrogen at low temperatures is monitored by local resistivity changes detected with spreading resistance measurements.

Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells

2007 ◽  
pp. 1147-1148 ◽  
Author(s):  
Hai Feng Li ◽  
Yong Huang ◽  
Zhi Jian Wan ◽  
Hou Xing Zhang ◽  
Li Ming Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films

Fabrication of an ant-nest nanostructure in polycrystalline silicon thin films for solar cells

2014 ◽  
Vol 92 ◽  
pp. 27-30 ◽  
Author(s):  
Chaowei Xue ◽  
Jialiang Huang ◽  
Jing Rao ◽  
Sergey Varlamov
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Ant Nest

Advanced silicon thin films for high-efficiency silicon heterojunction-based solar cells

2017 ◽  
Author(s):  
A. Descoeudres ◽  
J. Geissbiihler ◽  
J. Horzel ◽  
A. Lachowicz ◽  
J. Levrat ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
High Efficiency ◽  
Silicon Thin Films
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