High-precision small-scale laser focal spot measurements
2013 ◽
Vol 31
(1)
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pp. 177-183
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Keyword(s):
AbstractIn this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.