Two-dimensional omega energy-filtered CBED on the new Zeiss EM912
The Zeiss EM912 is a new digital, side-entry, 120 kV TEM/STEM for materials science, with omega magnetic imaging energy filter. Smallest probe is 1.6 nm. We have evaluated the 912 for quantitative CBED because we believe that the zero-loss filtered diffraction pattern is the most accurately quantifiable signal of any on a modern analytical TEM/STEM instrument. A double tilt holder and W filament were used. The magnetic filter allows energy-filtered images or diffraction patterns to be recorded without scanning using efficient parallel (area) detection. Comparisons with FEG STEM instruments depend on field of view - for a 103X103 pixel image, recording time with the Omega filter using LaB6 is 1000 times less than that of a STEM with a FEG (103 times brighter) for the same dose. For accurate measurement of structure-factor amplitudes and phases, elastic energy-filtered data must be used. This Bloch-wave refinement method has now been automated using "Simplex" multivariate analysis.