An Electron Gun Scanning Microscope
1968 ◽
Vol 26
◽
pp. 360-361
Keyword(s):
A simple scanning electron microscope has been built using a field emission electron gun. The gun is used alone, without the aid of auxiliary lenses, and is theoretically capable of producing a 100 Å probe with a beam current of 10-10 A. Such a beam current allows scan times of the order of a few seconds.A schematic drawing of the microscope is shown in Fig. 2. The field emission voltage is applied to the first anode which controls the emission current. An accelerating voltage is applied to the second anode, and the field between the anodes focuses the electrons to form an image of the tip at the specimen. The angular spread of the beam is limited by an aperture on the second anode.
1972 ◽
Vol 30
◽
pp. 434-435
1971 ◽
Vol 29
◽
pp. 32-33
◽
1974 ◽
Vol 32
◽
pp. 408-409
1983 ◽
Vol 41
◽
pp. 410-411
1980 ◽
Vol 38
◽
pp. 70-71
1973 ◽
Vol 31
◽
pp. 302-303
1989 ◽
Vol 47
◽
pp. 74-75
2002 ◽
Vol 61-62
◽
pp. 665-670
◽