EELS characterization of bulk crystal surfaces in Rem: Surface micro analysis and surface channelling effect
Electron energy-loss spectroscopy (EELS) is used in parallel with reflection electron microscopy (REM) for studying surface chemical characterization. The successful observation of Pt and Au M4,5 edge modifications in the REM case has shown that it is possible to do surface chemical analysis for those heavy elements [1]. The reflection of electrons from the surface is critically affected by the surface resonance condition; it has been shown that the electrons will propagate parallel to the surface for some distance if the incident angle satisfies the surface resonance (SR) condition[2-3], then surface channeling is likely to be observed in this SR case. There is less propagation along the surface under the surface non-resonance (SNR) condition.The GaAs bulk crystal (011) surface was chosen for observing the surface channeling effect in REM case, using a Philips 400T TEM. The surface absorbed oxygen is identified with the O-K edge (fig.l(A)).